INSPECTING SURFACES
    1.
    发明申请
    INSPECTING SURFACES 审中-公开

    公开(公告)号:US20170352599A1

    公开(公告)日:2017-12-07

    申请号:US15429525

    申请日:2017-02-10

    Abstract: Manufacturing a device may include inspecting a surface of an inspection target device. The inspecting may include forming a metal layer on a surface of the inspection target device on which a minute pattern is formed, directing a beam of light to be incident and normal to the surface of the inspection target device, determining a spectrum of light reflected from the surface of the inspection target device, and generating, via the spectrum, information associated with a structural characteristic of the minute pattern formed on the inspection target device. The inspection target device may be selectively incorporated into the manufactured device based on the generated information.

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