公开(公告)号：US11623853B2

公开(公告)日：2023-04-11

申请号：US17583653

申请日：2022-01-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kibeom Kil ,  Dongsoo Lee ,  Wooram Oh ,  Sangho Jang

IPC: B67B7/18 ,  B65B3/14 ,  B65B7/28 ,  B65B3/18 ,  B67C9/00 ,  H01L21/67

Abstract: A fluid supply apparatus includes a container supply holder configured to supply a container to a cap separator using a loading box, the container including a detachable nozzle cap, and configured to store a process fluid, a cap separator configured to receive the container from the loading box and separate the nozzle cap from a container body of the container using a cap clamper and a rotation actuator, the cap clamper configured to clamp and hold the nozzle cap, and the rotation actuator configured to rotate the container body, a fluid supplier configured to supply the process fluid contained in the container body through a fluid supply line, and a controller configured to control the container supply holder, the cap separator, and the fluid supplier.