公开(公告)号：US20250125182A1

公开(公告)日：2025-04-17

申请号：US18628404

申请日：2024-04-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： HYUN HO CHOI ,  JAEHWAN KIM ,  YONG-HO BAEK ,  HYEOK-JIN JEONG ,  HO YUNG CHONG

IPC: H01L21/687 ,  H01L21/673

Abstract: Disclosed are substrate rotating apparatuses, substrate processing systems, and substrate processing methods. The substrate rotating apparatus comprises vertically arranged stages and a rotary driver that turns the stages upside down. The stage includes a lower support assembly and an upper support assembly adjacent to the lower support assembly. The lower support assembly includes a lower support member having a lower support surface that supports one surface of a substrate. The upper support assembly includes upper support members. The upper support members are spaced apart from each other in a horizontal direction. A substrate placement space is between the upper support members. The upper support member includes an upper support surface that supports another surface of the substrate. The upper support surface is inclined toward the substrate placement space and makes an acute angle with the horizontal direction.