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公开(公告)号:US20240038809A1
公开(公告)日:2024-02-01
申请号:US18333191
申请日:2023-06-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ja Meyung Kim , Sung In Kim , Yeon Soo Ahn
IPC: H01L27/146
CPC classification number: H01L27/1463 , H01L27/14603 , H01L27/14636 , H01L27/14621
Abstract: An image sensor includes a substrate including a first face and a second face, the second face being opposite the first face in a first direction; a photoelectric conversion area disposed in the substrate; an active area disposed in the substrate and on the photoelectric conversion area; an element isolation pattern extending from the first face of the substrate into the substrate and defining the active area; and a transfer gate electrode including: a first portion extending from the first face of the substrate and extending through the element isolation pattern; and a second portion disposed on the active area, wherein the first portion extends through a bottom face of the element isolation pattern, wherein a vertical level of a bottom face of the first portion is lower than a vertical level of the bottom face of the element isolation pattern.