公开(公告)号：US20210351047A1

公开(公告)日：2021-11-11

申请号：US17381246

申请日：2021-07-21

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Beom Jin YOO ,  Min Hyoung KIM ,  Sang Ki NAM ,  Won Hyuk JANG ,  Kyu Hee HAN ,  Young Do KIM ,  Jeong Min BANG

IPC: H01L21/67 ,  H01J37/32 ,  H01L21/02

Abstract: A cleaning solution production system is for cleaning a semiconductor substrate. The system includes a pressure tank, a plasma reaction tank configured to form a plasma in gas bubbles suspended in a decompressed liquid obtained from the pressure tank to thereby generate radical species in the decompressed liquid, a storage tank configured to store a cleaning solution containing the radical species generated in the plasma reaction tank, and a nozzle configured to supply the cleaning solution from the storage tank to a semiconductor substrate.

公开(公告)号：US20200035515A1

公开(公告)日：2020-01-30

申请号：US16505488

申请日：2019-07-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Beom Jin YOO ,  Min Hyoung KIM ,  Sang Ki NAM ,  Won Hyuk JANG ,  Kyu Hee HAN ,  Young Do KIM ,  Jeong Min BANG

IPC: H01L21/67 ,  H01J37/32 ,  H01L21/02

Abstract: A cleaning solution production system is for cleaning a semiconductor substrate. The system includes a pressure tank, a plasma reaction tank configured to form a plasma in gas bubbles suspended in a decompressed liquid obtained from the pressure tank to thereby generate radical species in the decompressed liquid, a storage tank configured to store a cleaning solution containing the radical species generated in the plasma reaction tank, and a nozzle configured to supply the cleaning solution from the storage tank to a semiconductor substrate.

公开(公告)号：US20190057642A1

公开(公告)日：2019-02-21

申请号：US16104278

申请日：2018-08-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young Do KIM ,  Hyun Chang Shin ,  Song Hee Jung

IPC: G09G3/32 ,  G06K9/00 ,  G06K9/20

Abstract: An electronic device is provided. The electronic device includes a display panel including a plurality of pixels, a light source positioned around the plurality of pixels, a display driver integrated circuit including a driver configured to control whether the pixels emit light and a timing controller configured to control an on/off operation of the driver, a sensor electrically connected with the light source and the display driver integrated circuit, and configured to sense an external object by using light of a specified wavelength band emitted from the light source, and a processor electrically connected with the display driver integrated circuit and the sensor. The processor is configured to receive a time indicating when the timing controller turns off the driver from the display driver integrated circuit and allow the light source to emit the light of the specified wavelength band based at least on the received time.