公开(公告)号：US20040123907A1

公开(公告)日：2004-07-01

申请号：US10666734

申请日：2003-09-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yu-Kweon Kim ,  Seung-Ki Chae ,  Jai-Kang Jeon ,  Young-Seok Roh ,  Yong-Wook Lee

IPC: F16K037/00

CPC classification number: C23C16/45561 ,  Y10T137/0318 ,  Y10T137/5762 ,  Y10T137/8175

Abstract: A gas delivery system for providing a gas to manufacturing equipment includes a gas supply unit for providing the gas to the manufacturing equipment including devices to regulate the supply of gas from the gas supply unit to the manufacturing equipment. The system includes a main control unit for regulating the supply of the gas to the manufacturing equipment. The gas delivery system includes a supplemental control unit which receives an emergency shutdown signal from the main control unit for closing off the supply of gas in response to a malfunction of the main control unit and generates a signal for maintaining a gas flow to operate the manufacturing equipment until the cause of the malfunction has been determined. With the system, an unnecessary emergency shutdown of gas supply to semiconductor manufacturing equipment in response to a malfunction of a main controller can be prevented.

Abstract translation: 用于向制造设备提供气体的气体输送系统包括用于向制造设备提供气体的气体供应单元，包括用于调节从气体供应单元向制造设备供应气体的装置。 该系统包括用于调节向制造设备供应气体的主控制单元。 气体输送系统包括补充控制单元，其接收来自主控制单元的紧急关闭信号，用于响应于主控制单元的故障而关闭气体供应，并产生维持气流以操作制造的信号 设备直到故障原因确定。 利用该系统，可以防止响应于主控制器的故障而对半导体制造设备的气体供应的不必要的紧急关闭。