公开(公告)号：US20160290933A1

公开(公告)日：2016-10-06

申请号：US14955331

申请日：2015-12-01

Applicant: Samsung Electronics Co., Ltd. ,  Samsung Display Co., Ltd.

Inventor： Wonguk Seo ,  Kyoungchon KIM ,  Kuihyun YOON ,  Kyunlae KIM ,  Jaeyoung PARK ,  Kyoungho YANG ,  Young HEO

IPC: G01N21/94 ,  G01N21/958 ,  G01N21/88

CPC classification number: G01N21/94 ,  G01N21/8806 ,  G01N21/958 ,  G01N2021/9513

Abstract: Provided is an optical inspection system including a supporting unit, allowing a target object to be loaded thereon, a light source unit configured to emit a laser beam toward the target object, a light condensing unit collecting scattered light that is scattered at the target object when the laser beam is irradiated onto the target object, and a control unit controlling the light source unit and the light condensing unit and analyzing the scattered light to examine whether there are pollutants on the target object. The supporting unit may include a first supporting unit, on which the target object is disposed, and which is formed of a first material, and a second supporting unit, which is disposed under the first supporting unit and is formed of a second material different from the first material.

Abstract translation: 提供了一种光学检查系统，包括：允许目标物体被装载在其上的支撑单元，被构造成朝向目标物体发射激光束的光源单元，收集在目标物体处散射的散射光的聚光单元， 激光束被照射到目标物体上，控制单元控制光源单元和聚光单元并分析散射光以检查目标物体上是否存在污染物。 所述支撑单元可以包括第一支撑单元，所述目标物体设置在所述第一支撑单元上，并且所述第一支撑单元由第一材料形成，所述第二支撑单元设置在所述第一支撑单元的下方，并且由不同于 第一种材料。