DEVICE, METHOD, AND SYSTEM FOR TRANSFORMING MEASUREMENT DATA

    公开(公告)号:US20250025981A1

    公开(公告)日:2025-01-23

    申请号:US18647240

    申请日:2024-04-26

    Abstract: The present disclosure relates to devices, methods, and systems for transforming measurement data. An example device for transforming measurement data includes a communicator configured to receive first measurement data, the first measurement data including step height values on a semiconductor chip with a chemical mechanical polishing (CMP) process performed thereon, and to receive layout data comprising a layout included in the semiconductor chip, and a processor configured to, based on the layout data, transform the first measurement data to second measurement data, the second measurement data including step height values of the semiconductor chip with a metal deposited thereon.

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