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1.
公开(公告)号:US11518909B2
公开(公告)日:2022-12-06
申请号:US16645343
申请日:2018-02-13
发明人: Kunbae Noh , Taeksoo Kwak , Junyoung Jang , Yoonyoung Koo , Yonggoog Kim , Jingyo Kim , Jin-Hee Bae , Jun Sakong , Jinwoo Seo , Sooyeon Sim , Huichan Yun , Jiho Lee , Kwen-Woo Han , Byeong Gyu Hwang
IPC分类号: C09D183/16 , H01L21/02 , H01L21/306
摘要: Provided is a composition for forming a silica layer, the composition containing a silicon-containing polymer and a solvent, wherein a silica layer formed of the composition for forming the silica layer satisfies Relation 1. The definition of Relation 1 is as described in the specification. The definition of Relation 1 is the same as described in the specification.