公开(公告)号：US07830505B2

公开(公告)日：2010-11-09

申请号：US12222332

申请日：2008-08-07

申请人： Sang Woo Kang ,  Ju Young Yun ,  Dae Jin Seong ,  Yong Hyeon Shin

发明人： Sang Woo Kang ,  Ju Young Yun ,  Dae Jin Seong ,  Yong Hyeon Shin

IPC分类号： G01J3/30

CPC分类号： G01N21/3504 ,  G01N21/031 ,  G01N2021/151

摘要： The present invention relates to a spectroscopy analyzer for real-time diagnostics of process, and more particularly, to a spectroscopy analyzer for real-time diagnostics of process, in which a beam is injected to a reaction byproduct or a reactant and then an output beam is measured, thereby performing quantitative and qualitative analysis of the reaction byproduct or the reactant.

摘要翻译： 本发明涉及一种用于过程实时诊断的光谱分析仪，更具体地说，涉及用于对工艺进行实时诊断的光谱分析仪，其中将光束注入反应副产物或反应物，然后输出光束 ，由此对反应副产物或反应物进行定量和定性分析。

公开(公告)号：US20090046285A1

公开(公告)日：2009-02-19

申请号：US12222332

申请日：2008-08-07

申请人： Sang Woo Kang ,  Ju Young Yun ,  Dae Jin Seong ,  Yong Hyeon Shin

发明人： Sang Woo Kang ,  Ju Young Yun ,  Dae Jin Seong ,  Yong Hyeon Shin

IPC分类号： G01N21/25

CPC分类号： G01N21/3504 ,  G01N21/031 ,  G01N2021/151

摘要： The present invention relates to a spectroscopy analyzer for real-time diagnostics of process, and more particularly, to a spectroscopy analyzer for real-time diagnostics of process, in which a beam is injected to a reaction byproduct or a reactant and then an output beam is measured, thereby performing quantitative and qualitative analysis of the reaction byproduct or the reactant.

摘要翻译： 本发明涉及一种用于过程实时诊断的光谱分析仪，更具体地说，涉及用于对工艺进行实时诊断的光谱分析仪，其中将光束注入反应副产物或反应物，然后输出光束 ，由此对反应副产物或反应物进行定量和定性分析。

公开(公告)号：US20080000585A1

公开(公告)日：2008-01-03

申请号：US11467062

申请日：2006-08-24

申请人： Jung Hyung Kim ,  Ju Young Yun ,  Dae Jin Seong

发明人： Jung Hyung Kim ,  Ju Young Yun ,  Dae Jin Seong

IPC分类号： C23F1/00

CPC分类号： H05H1/0062

摘要： The present invention relates to an apparatus and method for monitoring an electron density and electron temperature of a plasma. The apparatus includes an electromagnetic wave generator that continuously transmits electromagnetic wave of a series of frequency bands, an electromagnetic wave transceiver connected to a plasma within a reaction container and electrically connected to the electromagnetic wave generator so that a frequency of the transmitted electromagnetic wave is correlated to the electron density and electron temperature of the plasma, the electromagnetic wave transceiver transmitting the electromagnetic wave, a frequency analyzer electrically connected to the electromagnetic wave transceiver, for analyzing the frequency of the electromagnetic wave received from the electromagnetic wave transceivers and a computer electrically connected to the electromagnetic wave generator and the frequency analyzer, for calculating a correlation between the electron density and electron temperature, and a corresponding electromagnetic wave based on a frequency band-based transmission command of the electromagnetic wave and the analyzed data.

摘要翻译： 本发明涉及一种用于监测等离子体的电子密度和电子温度的装置和方法。 该装置包括：电磁波发生器，其连续地发送一系列频带的电磁波;电磁波收发器，其连接到反应容器内的等离子体并电连接到电磁波发生器，使得发射的电磁波的频率相关 对等离子体的电子密度和电子温度，电磁波收发器传送电磁波，频率分析仪电连接到电磁波收发器，用于分析从电磁波收发器接收的电磁波的频率和电气连接的计算机 对于电磁波发生器和频率分析器，用于计算电子密度和电子温度之间的相关性，以及基于电磁体的基于频带的传输命令的对应的电磁波 c波和分析数据。

公开(公告)号：US06171958B2

公开(公告)日：2001-01-09

申请号：US09006948

申请日：1998-01-14

申请人： Shi Woo Rhee ,  Ju Young Yun

发明人： Shi Woo Rhee ,  Ju Young Yun

IPC分类号： H01L2144

CPC分类号： H01L21/76841 ,  C23C16/34

摘要： A process for preparing a diffusion barrier on a semiconductor substrate which comprises: conducting remote plasma-enhanced metal organic chemical vapor deposition of a thin film of TiNx on said substrate using an organotitanium compound under a flow of H2 plasma, wherein x ranges from 0.1 to 1.5, provides a TiNx thin film having a low carbon content and low specific resistivity.

摘要翻译： 一种在半导体衬底上制备扩散阻挡层的方法，包括：在H 2等离子体流下，使用有机钛化合物在所述衬底上进行TiNx薄膜的远程等离子体增强金属有机化学气相沉积，其中x为0.1〜 提供了具有低碳含量和低电阻率的TiNx薄膜。

公开(公告)号：US20110231251A1

公开(公告)日：2011-09-22

申请号：US12662947

申请日：2010-05-13

申请人： Ho Yeon Jang ,  Ju Young Yun

发明人： Ho Yeon Jang ,  Ju Young Yun

IPC分类号： G06Q30/00 ,  H04N7/025 ,  G06Q20/00

CPC分类号： H04N21/812 ,  G06Q30/02 ,  G06Q30/0241 ,  G06Q30/0251 ,  H04N21/4886

摘要： Provided are a digital broadcast network system for providing a widget service and an operating method thereof The digital broadcast network system includes a communication network, a broadcast terminal, and a broadcasting station system. The broadcasting station system provides widget advertisement contents, received from a widget content provider, to the broadcast terminal. The broadcast terminal outputs the received widget advertisement contents to a display unit in response to a widget display control signal, and transmits product purchase information to the broadcasting station system when receiving a purchase request signal for products included in the widget advertisement contents.

摘要翻译： 提供了一种用于提供小窗口服务的数字广播网络系统及其操作方法。数字广播网络系统包括通信网络，广播终端和广播站系统。 广播电台系统向广播终端提供从小窗口内容提供者接收到的窗口小部件广告内容。 广播终端响应于小窗口显示控制信号将接收到的窗口小部件广告内容输出到显示单元，并且当接收到包含在窗口小部件广告内容中的商品的购买请求信号时，向广播电台系统发送商品购买信息。

公开(公告)号：US20090064756A1

公开(公告)日：2009-03-12

申请号：US11938008

申请日：2007-11-09

申请人： Seung Soo Hong ,  Jin Tae Kim ,  Ju Young Yun

发明人： Seung Soo Hong ,  Jin Tae Kim ,  Ju Young Yun

IPC分类号： G01L27/00

CPC分类号： G01L27/005

摘要： The present invention provides a vacuum gauge calibration apparatus capable of calibrating and testing a vacuum gauge without displacement or separation of the vacuum gauge, the vacuum gauge being attached to a vacuum device under operation together with developing a movable vacuum gauge calibration device, and an operating method thereof. According to the present invention, there is provided an apparatus for calibrating and testing a vacuum gauge to be calibrated without displacement, the vacuum gauge being connected to a vacuum device, the apparatus comprising: a vacuum shut-off valve for opening and closing a piping for connecting the vacuum device to the to-be-calibrated vacuum gauge; and a movable vacuum gauge calibration device connected to the to-be-calibrated vacuum gauge, wherein the movable vacuum gauge calibration device includes: a reference vacuum gauge, a vacuum connection valve, a vacuum chamber, a gate valve, and an exhaust device which are connected to the to-be-calibrated vacuum gauge side in series; a gas supply source connected to the vacuum chamber for generating pressure in the vacuum chamber; a leak valve for controlling gas flow in the gas supply source and supplying the gas the vacuum chamber; and a vacuum gauge for the vacuum chamber for measuring vacuum pressure in the vacuum chamber.

摘要翻译： 本发明提供了一种真空计校准装置，其能够在不移动或分离真空计的情况下对真空计进行校准和测试，真空计与可操作的真空计校准装置一起运行的真空装置连接，以及操作 方法。 根据本发明，提供了一种用于校准和测试要在无位移校准的真空计的装置，该真空计连接到真空装置，该装置包括：用于打开和关闭管道的真空截止阀 用于将真空装置连接到待校准的真空计上; 以及连接到待校准的真空计的可移动的真空计校准装置，其中所述可移动真空计校准装置包括：参考真空计，真空连接阀，真空室，闸阀和排气装置， 被连接到待校准的真空计侧面串联; 连接到真空室的气体供应源，用于在真空室中产生压力; 用于控制气体供应源中的气体流并将气体供给真空室的泄漏阀; 以及用于真空室的真空计，用于测量真空室中的真空压力。