公开(公告)号：US20080000585A1

公开(公告)日：2008-01-03

申请号：US11467062

申请日：2006-08-24

申请人： Jung Hyung Kim ,  Ju Young Yun ,  Dae Jin Seong

发明人： Jung Hyung Kim ,  Ju Young Yun ,  Dae Jin Seong

IPC分类号： C23F1/00

CPC分类号： H05H1/0062

摘要： The present invention relates to an apparatus and method for monitoring an electron density and electron temperature of a plasma. The apparatus includes an electromagnetic wave generator that continuously transmits electromagnetic wave of a series of frequency bands, an electromagnetic wave transceiver connected to a plasma within a reaction container and electrically connected to the electromagnetic wave generator so that a frequency of the transmitted electromagnetic wave is correlated to the electron density and electron temperature of the plasma, the electromagnetic wave transceiver transmitting the electromagnetic wave, a frequency analyzer electrically connected to the electromagnetic wave transceiver, for analyzing the frequency of the electromagnetic wave received from the electromagnetic wave transceivers and a computer electrically connected to the electromagnetic wave generator and the frequency analyzer, for calculating a correlation between the electron density and electron temperature, and a corresponding electromagnetic wave based on a frequency band-based transmission command of the electromagnetic wave and the analyzed data.

摘要翻译： 本发明涉及一种用于监测等离子体的电子密度和电子温度的装置和方法。 该装置包括：电磁波发生器，其连续地发送一系列频带的电磁波;电磁波收发器，其连接到反应容器内的等离子体并电连接到电磁波发生器，使得发射的电磁波的频率相关 对等离子体的电子密度和电子温度，电磁波收发器传送电磁波，频率分析仪电连接到电磁波收发器，用于分析从电磁波收发器接收的电磁波的频率和电气连接的计算机 对于电磁波发生器和频率分析器，用于计算电子密度和电子温度之间的相关性，以及基于电磁体的基于频带的传输命令的对应的电磁波 c波和分析数据。

公开(公告)号：US07830505B2

公开(公告)日：2010-11-09

申请号：US12222332

申请日：2008-08-07

申请人： Sang Woo Kang ,  Ju Young Yun ,  Dae Jin Seong ,  Yong Hyeon Shin

发明人： Sang Woo Kang ,  Ju Young Yun ,  Dae Jin Seong ,  Yong Hyeon Shin

IPC分类号： G01J3/30

CPC分类号： G01N21/3504 ,  G01N21/031 ,  G01N2021/151

摘要： The present invention relates to a spectroscopy analyzer for real-time diagnostics of process, and more particularly, to a spectroscopy analyzer for real-time diagnostics of process, in which a beam is injected to a reaction byproduct or a reactant and then an output beam is measured, thereby performing quantitative and qualitative analysis of the reaction byproduct or the reactant.

摘要翻译： 本发明涉及一种用于过程实时诊断的光谱分析仪，更具体地说，涉及用于对工艺进行实时诊断的光谱分析仪，其中将光束注入反应副产物或反应物，然后输出光束 ，由此对反应副产物或反应物进行定量和定性分析。

公开(公告)号：US20090046285A1

公开(公告)日：2009-02-19

申请号：US12222332

申请日：2008-08-07

申请人： Sang Woo Kang ,  Ju Young Yun ,  Dae Jin Seong ,  Yong Hyeon Shin

发明人： Sang Woo Kang ,  Ju Young Yun ,  Dae Jin Seong ,  Yong Hyeon Shin

IPC分类号： G01N21/25

CPC分类号： G01N21/3504 ,  G01N21/031 ,  G01N2021/151

摘要： The present invention relates to a spectroscopy analyzer for real-time diagnostics of process, and more particularly, to a spectroscopy analyzer for real-time diagnostics of process, in which a beam is injected to a reaction byproduct or a reactant and then an output beam is measured, thereby performing quantitative and qualitative analysis of the reaction byproduct or the reactant.

摘要翻译： 本发明涉及一种用于过程实时诊断的光谱分析仪，更具体地说，涉及用于对工艺进行实时诊断的光谱分析仪，其中将光束注入反应副产物或反应物，然后输出光束 ，由此对反应副产物或反应物进行定量和定性分析。

公开(公告)号：US06687626B2

公开(公告)日：2004-02-03

申请号：US10079994

申请日：2002-02-19

申请人： Dae Jin Seong ,  Yong Hyeon Shin ,  Jung Hyung Kim ,  Jong Yeon Lim ,  Kwang Hwa Jung

发明人： Dae Jin Seong ,  Yong Hyeon Shin ,  Jung Hyung Kim ,  Jong Yeon Lim ,  Kwang Hwa Jung

IPC分类号： G06F1900

CPC分类号： G01F1/698 ,  G01F1/684

摘要： A flux distribution measuring apparatus measures distribution of flow rates of a flowable medium. The measuring apparatus includes thin metal wire(s) for scanning a flowable medium and lead wires connected to the thin metal wire(s), wherein a voltage difference is detected between adjacent lead wires while the measuring apparatus scans the flowable medium in the direction perpendicular to a flow path of the flowable medium. The voltage differences are generated due to temperature changes in the thin metal wire(s) while scanning the flowable medium having different flow rates. The measuring apparatus visualizes the distribution of flow rates of a flowable medium using a computer which receives and processes the voltage differences detected.

摘要翻译： 流量分布测定装置测定流动介质的流量分布。 测量装置包括用于扫描可流动介质的细金属丝和连接到细金属丝的引线，其中在相邻导线之间检测到电压差，同时测量装置沿垂直方向扫描可流动介质 到可流动介质的流动路径。 由于薄金属线中的温度变化而产生电压差，同时扫描具有不同流速的可流动介质。 测量装置使用接收和处理检测到的电压差的计算机来可视化可流动介质的流量分布。