BIOLOGICALLY BASED CHAMBER MATCHING
    1.
    发明申请
    BIOLOGICALLY BASED CHAMBER MATCHING 有权
    基于生物学的腔室匹配

    公开(公告)号:US20120242667A1

    公开(公告)日:2012-09-27

    申请号:US13052943

    申请日:2011-03-21

    IPC分类号: G06T11/20

    摘要: The subject disclosure relates to automatically learning relationships among a plurality of manufacturing tool parameters as applied to arbitrary semiconductor manufacturing tools and a graphical user interface that is supported, at least in part, by an autonomous learning system. The graphical user interface can create one or more matrixes based on received data and can further generate additional matrices by transforming the one or more matrixes. A series of windows can be output, wherein the series of windows, provide performance analysis that comprises a matching between a focus chamber and a reference chamber. In an aspect, the focus chamber and the reference chamber can be different chambers. In another aspect, the focus chamber and the reference chamber can be the same chamber, which provides analysis of the deterioration in performance of the same chamber over time.

    摘要翻译: 本公开涉及自动学习应用于任意半导体制造工具的多个制造工具参数之间的关系以及至少部分由自主学习系统支持的图形用户界面。 图形用户界面可以基于接收到的数据创建一个或多个矩阵,并且可以通过转换一个或多个矩阵来进一步生成附加矩阵。 可以输出一系列窗口,其中该系列窗口提供包括聚焦室和参考室之间的匹配的性能分析。 在一个方面,聚焦室和参考室可以是不同的室。 在另一方面,聚焦室和参考室可以是相同的室,其提供了相同室随时间的性能劣化的分析。

    Biologically based chamber matching
    2.
    发明授权
    Biologically based chamber matching 有权
    基于生物学的室匹配

    公开(公告)号:US08723869B2

    公开(公告)日:2014-05-13

    申请号:US13052943

    申请日:2011-03-21

    IPC分类号: G06T11/20

    摘要: The subject disclosure relates to automatically learning relationships among a plurality of manufacturing tool parameters as applied to arbitrary semiconductor manufacturing tools and a graphical user interface that is supported, at least in part, by an autonomous learning system. The graphical user interface can create one or more matrixes based on received data and can further generate additional matrices by transforming the one or more matrixes. A series of windows can be output, wherein the series of windows, provide performance analysis that comprises a matching between a focus chamber and a reference chamber. In an aspect, the focus chamber and the reference chamber can be different chambers. In another aspect, the focus chamber and the reference chamber can be the same chamber, which provides analysis of the deterioration in performance of the same chamber over time.

    摘要翻译: 本公开涉及自动学习应用于任意半导体制造工具的多个制造工具参数之间的关系以及至少部分由自主学习系统支持的图形用户界面。 图形用户界面可以基于接收到的数据创建一个或多个矩阵,并且可以通过转换一个或多个矩阵来进一步生成附加矩阵。 可以输出一系列窗口,其中该系列窗口提供包括聚焦室和参考室之间的匹配的性能分析。 在一个方面,聚焦室和参考室可以是不同的室。 在另一方面,聚焦室和参考室可以是相同的室,其提供了相同室随时间的性能劣化的分析。

    Methods and systems for automatically generating provably correct computer program code
    6.
    发明申请
    Methods and systems for automatically generating provably correct computer program code 失效
    用于自动生成可证明正确的计算机程序代码的方法和系统

    公开(公告)号:US20050137992A1

    公开(公告)日:2005-06-23

    申请号:US10739187

    申请日:2003-12-19

    申请人: Wolfgang Polak

    发明人: Wolfgang Polak

    CPC分类号: G06N3/126 G06F8/30

    摘要: A provably correct computer program can be generated using genetic programming techniques. A desired behavior is used to define a formal specification. An initial population of programs is created where each program has a meaning that can be defined using a formalization technique. A fitness function is applied to measure a distance between the meaning of a program, i.e., its actual behavior, and the specification. Any program having a zero value as the measure of distance between the meaning of the program and the specification is determined to be provably correct. After the fitness of some or all of the programs in the current generation of programs has been computed, a provably correct program has not yet been found in the current generation, mutation and/or crossover techniques are performed on at least some of the fittest individuals in the current generation to create the programs of a next generation.

    摘要翻译: 可以使用遗传编程技术生成可证明正确的计算机程序。 使用期望的行为来定义正式规范。 创建程序的初始种群,其中每个程序具有可以使用形式化技术定义的含义。 应用适应度函数来测量节目的含义之间的距离,即其实际行为和规格。 任何具有零值作为程序含义与规范之间距离的度量的程序被确定为可证明是正确的。 在计算当前一代节目中的部分或全部节目的适应性之后,在当前一代还没有发现可证明正确的节目,在至少一些适合个人的情况下进行突变和/或交叉技术 在当代创造下一代节目。

    System and method for automatic design of component libraries
    8.
    发明申请
    System and method for automatic design of component libraries 有权
    组件库自动设计的系统和方法

    公开(公告)号:US20070100784A1

    公开(公告)日:2007-05-03

    申请号:US11264219

    申请日:2005-11-01

    IPC分类号: G06F17/30

    CPC分类号: G06F8/36 G06F2217/02

    摘要: Embodiments of the present invention introduce a novel recursive assembly process to automatically create a library of components. It starts with simple components used as building blocks and proceeds by repeatedly combining these randomly into more complex ones. The utility and quality of these random combinations of components are measured against a set of functional goals. Useful combinations then become new components in the library that can be used as building blocks for further random combination. This description is not intended to be a complete description of, or limit the scope of, the invention. Other features, aspects, and objects of the invention can be obtained from a review of the specification, the figures, and the claims.

    摘要翻译: 本发明的实施例引入了一种新的递归组装过程以自动创建组件库。 它以用作构建块的简单组件开始,并将它们随机地重复地组合到更复杂的组件中。 根据一组功能目标来测量这些随机组合的效用和质量。 有用的组合然后成为库中的新组件,可用作进一步随机组合的构建块。 本说明书不是对本发明的完整描述或限制本发明的范围。 本发明的其它特征,方面和目的可以通过对说明书,附图和权利要求的评述来获得。