摘要:
A target supporting apparatus includes a first supporting member having a plurality of first suction holes open to the front surface of the member and the rear surface thereof; a second supporting member having a plurality of second suction holes formed therein and being stacked on and fixed to the first supporting member, the cross-sectional area of each of the plurality of second suction holes being smaller than the cross-sectional area of each of the plurality of first suction holes; and a sucking unit that sucks in the plurality of first suction holes and hence sucks in the plurality of second suction holes communicating with the plurality of first suction holes. Here, a target which is supported in order for a liquid to be adhered thereto is sucked and held onto a supporting face of the second supporting member due to the driving of the sucking unit.