公开(公告)号：US11293821B2

公开(公告)日：2022-04-05

申请号：US16316079

申请日：2017-07-19

Applicant: Sciosense B.V.

Inventor： Roel Daamen ,  Kailash Vijayakumar ,  Hendrik Bouman ,  Remco Henricus Wilhelmus Pijnenburg ,  Twan Van Lippen

IPC: G01L9/00 ,  B81C1/00

Abstract: In an embodiment, a pressure sensor module includes a base electrode surrounding at least a part of a bottom electrode, an anchor arrangement on top of the base electrode including at least two electrically conductive walls that both surround at least the part of the bottom electrode and an electrically conductive layer that covers at least the bottom electrode and the anchor arrangement such that a cavity is formed between the bottom electrode, the anchor arrangement and the electrically conductive layer, wherein, on at least one side of the cavity, a proportionate area of the electrically conductive walls in a cross section extending from a surface of an inner wall of the anchor arrangement facing the cavity to a surface of an outermost wall of the anchor arrangement facing away from the cavity in a plane parallel to a plane of the bottom electrode is equal to or less than 10%.