公开(公告)号：US11002696B2

公开(公告)日：2021-05-11

申请号：US16079080

申请日：2017-02-21

Applicant: Sciosense B.V.

Inventor： Dimitri Soccol ,  Viet Nguyen Hoang ,  David Van Steenwinckel ,  Roel Daamen ,  Pascal Bancken

IPC: G01N25/00 ,  G01K7/00 ,  G01N25/68

Abstract: In an embodiment a dew point sensor device includes a semiconductor substrate, a top layer arranged on the semiconductor substrate, a Peltier element integrated in the semiconductor substrate, a temperature sensor, a capacitor arranged at a surface of the top layer facing away from the semiconductor substrate, the temperature sensor and the capacitor being arranged so that a temperature of the capacitor is measurable by the temperature sensor, wherein the capacitor includes a plurality of capacitor elements each having a capacitance, and an electronic circuit configured for an individual determination of the capacitances and a generation of a set of binary digits, each of the binary digits corresponding to one of the capacitor elements and indicating whether the capacitance of the capacitor element is within a predefined range.

公开(公告)号：US11525793B2

公开(公告)日：2022-12-13

申请号：US17225670

申请日：2021-04-08

Applicant: Sciosense B.V.

Inventor： Dimitri Soccol ,  Viet Nguyen Hoang ,  David Van Steenwinckel ,  Roel Daamen ,  Pascal Bancken

IPC: G01N25/68

Abstract: In an embodiment a method includes determining, for each capacitor element of a plurality of capacitor elements of a capacitor, an increase of a capacitance of a capacitor element caused by a decrease of a temperature of the capacitor and deriving a dew point from a temperature at which the increases of the capacitances or values corresponding to the increases of the capacitances exceed a predefined limit by generating a set of binary digits, each of the binary digits corresponding to one of the capacitor elements and indicating whether the capacitance of the capacitor element is within a predefined range, comparing sets of binary digits generated at different temperatures and determining a number of capacitor elements for which the corresponding binary digits of the sets are different and repeating the comparison for a sequence of sets generated at decreasing temperatures.

公开(公告)号：US20210223193A1

公开(公告)日：2021-07-22

申请号：US17225670

申请日：2021-04-08

Applicant: Sciosense B.V.

Inventor： Dimitri Soccol ,  Viet Nguyen Hoang ,  David Van Steenwinckel ,  Roel Daamen ,  Pascal Bancken

IPC: G01N25/68

Abstract: In an embodiment a method includes determining, for each capacitor element of a plurality of capacitor elements of a capacitor, an increase of a capacitance of a capacitor element caused by a decrease of a temperature of the capacitor and deriving a dew point from a temperature at which the increases of the capacitances or values corresponding to the increases of the capacitances exceed a predefined limit by generating a set of binary digits, each of the binary digits corresponding to one of the capacitor elements and indicating whether the capacitance of the capacitor element is within a predefined range, comparing sets of binary digits generated at different temperatures and determining a number of capacitor elements for which the corresponding binary digits of the sets are different and repeating the comparison for a sequence of sets generated at decreasing temperatures.

公开(公告)号：US11293821B2

公开(公告)日：2022-04-05

申请号：US16316079

申请日：2017-07-19

Applicant: Sciosense B.V.

Inventor： Roel Daamen ,  Kailash Vijayakumar ,  Hendrik Bouman ,  Remco Henricus Wilhelmus Pijnenburg ,  Twan Van Lippen

IPC: G01L9/00 ,  B81C1/00

Abstract: In an embodiment, a pressure sensor module includes a base electrode surrounding at least a part of a bottom electrode, an anchor arrangement on top of the base electrode including at least two electrically conductive walls that both surround at least the part of the bottom electrode and an electrically conductive layer that covers at least the bottom electrode and the anchor arrangement such that a cavity is formed between the bottom electrode, the anchor arrangement and the electrically conductive layer, wherein, on at least one side of the cavity, a proportionate area of the electrically conductive walls in a cross section extending from a surface of an inner wall of the anchor arrangement facing the cavity to a surface of an outermost wall of the anchor arrangement facing away from the cavity in a plane parallel to a plane of the bottom electrode is equal to or less than 10%.