Patterned and directional selective roughening of a slider air-bearing surface
    1.
    发明申请
    Patterned and directional selective roughening of a slider air-bearing surface 审中-公开
    滑块空气轴承表面的图案化和方向选择性粗糙化

    公开(公告)号:US20020122275A1

    公开(公告)日:2002-09-05

    申请号:US10062160

    申请日:2002-01-31

    CPC分类号: G11B5/6005

    摘要: An information handling system, such as a disk drive, including a base, a disk stack rotatably attached to the base, and an actuator assembly movably attached to the base. The actuator assembly also includes a load spring and a slider attached to said load spring. The slider and load spring are attached to form a gimballing connection between the slider and the load spring. The slider includes an air-bearing surface which has a contact area. The slider also includes a transducer. The transducer is typically located near said contact area. The contact area includes a roughened surface portion and a smooth surface portion. The smooth surface portion is adjacent the transducer. The roughened surface portion is rougher than the smooth surface portion. The roughened surface portion is also rougher than the other surfaces associated with the air-bearing surface of the slider. The roughened surface portion of the contact area is formed by one of several techniques. One of the techniques uses a wet etch to remove at least one of the phases of a multi-phase material. Another technique defines the area to be roughened using photolithography. After exposing the photoresist using either a mask or a laser, a portion of photoresist is removed and the areas unprotected by photoresist are dry etched to form the roughened contact area.

    摘要翻译: 诸如盘驱动器的信息处理系统,包括基座,可旋转地附接到基座的盘堆,以及可移动地附接到基座的致动器组件。 致动器组件还包括负载弹簧和附接到所述负载弹簧的滑块。 滑块和负载弹簧被连接以在滑块和负载弹簧之间形成一个平衡连接。 滑块包括具有接触面积的空气轴承表面。 滑块还包括换能器。 传感器通常位于所述接触区域附近。 接触区域包括粗糙表面部分和光滑表面部分。 光滑表面部分与传感器相邻。 粗糙表面部分比光滑表面部分更粗糙。 粗糙表面部分也比与滑块的空气轴承表面相关联的其它表面更粗糙。 接触区域的粗糙表面部分由几种技术之一形成。 其中一种技术使用湿蚀刻来去除多相材料的至少一相。 另一种技术使用光刻法定义要粗糙化的区域。 在使用掩模或激光曝光光致抗蚀剂之后,去除光刻胶的一部分,并将未被光致抗蚀剂保护的区域干蚀刻以形成粗糙化的接触区域。