公开(公告)号：US11635679B1

公开(公告)日：2023-04-25

申请号：US17032358

申请日：2020-09-25

Applicant: Seagate Technology LLC

Inventor： Dan Yu ,  Aaron Michael Bowser

IPC: G03F1/30

Abstract: An alternating phase-shifting mask (Alt-PSM) comprising a 0° phase portion having a first width and a 180° phase portion having a second width greater than the first width. Example differences between the width of the 180° phase portion and the 0° phase portion may be 10 nm, 15 nm, or 20 nm. An Alt-PSM having phase portions of different widths can have an aerial image intensity transmission graph that is symmetric, for example, at 0.2-0.3 intensity.

公开(公告)号：US10859903B1

公开(公告)日：2020-12-08

申请号：US15843451

申请日：2017-12-15

Applicant: Seagate Technology LLC

Inventor： Dan Yu ,  Aaron Michael Bowser

IPC: G03F1/30

Abstract: An alternating phase-shifting mask (Alt-PSM) comprising a 0° phase portion having a first width and a 180° phase portion having a second width greater than the first width. Example differences between the width of the 180° phase portion and the 0° phase portion may be 10 nm, 15 nm, or 20 nm. An Alt-PSM having phase portions of different widths can have an aerial image intensity transmission graph that is symmetric, for example, at 0.2-0.3 intensity.