公开(公告)号：US11456154B2

公开(公告)日：2022-09-27

申请号：US14685107

申请日：2015-04-13

Applicant: Semes Co., Ltd.

Inventor： Seung-Jin Park ,  Hyoseong Seong ,  Jung Min Won ,  Doo ho Lim

IPC: H01J37/32 ,  C23C16/505

Abstract: Provided is a substrate treatment apparatus including a process chamber, a supporting unit, a gas supplying unit, and a plasma generating unit. The plasma generating unit may include a power, a primary antenna connected to the power through a first line, a secondary antenna connected to the power through a second line diverging from the first line at a first junction, the primary and secondary antennas being connected in parallel to the power, a third reactance device connected to the power through a third line diverging from the second line at a second junction, the secondary antenna and the third reactance device being connected in parallel to the power, and a variable reactance installed on the second line between the second junction and the secondary antenna.