公开(公告)号：US20030012623A1

公开(公告)日：2003-01-16

申请号：US10185773

申请日：2002-06-27

Applicant: Semitool, Inc.

Inventor： Jeffry Alan Davis ,  Andro Ardiano Purnomohadi ,  Daniel Thomas Potter

IPC: B65G001/10

CPC classification number: H01L21/67781 ,  G11B17/08 ,  G11B23/00 ,  Y10S414/139 ,  Y10S414/14

Abstract: An apparatus for loading media carriers into a processing chamber, including a pivoting arm mechanism which accepts a carrier in at a lower position, locks it on the arm, and provides a power-assisted movement of the carrier lifting it into an upper position proximate the opening to the processing chamber, where the arm is locked in place, with the carrier then pushed along a ramp on the arm directly into the processing chamber.

Abstract translation: 一种用于将介质载体装载到处理室中的装置，包括在较低位置处接收载体的枢转臂机构将其锁定在臂上，并且提供载体的动力辅助运动，将其提升到靠近 打开到处理室，其中臂被锁定就位，载体然后沿着臂上的坡道被直接推入处理室。