公开(公告)号：US06464790B1

公开(公告)日：2002-10-15

申请号：US09527341

申请日：2000-03-17

申请人： Semyon Sherstinsky ,  Arnold Kholodenko ,  Calvin Augason ,  Samuel Wilson ,  Michael Phillips ,  Leonel Zuniga

发明人： Semyon Sherstinsky ,  Arnold Kholodenko ,  Calvin Augason ,  Samuel Wilson ,  Michael Phillips ,  Leonel Zuniga

IPC分类号： C23C1600

CPC分类号： C23C16/45521 ,  C23C16/4585 ,  C23C16/4586 ,  C30B25/12 ,  H01L21/6838

摘要： The present invention generally provides a support member adapted to provide vacuum chucking. In one aspect, a support member having an upper surface having an outer, raised portion defining an inner, recessed portion is provided. The inner recessed portion is in fluid communication with a vacuum supply. The support member may include a plurality of raised support portions having one or more recessed portions adjacent thereto, the raised support portions having equal heights above the recessed portions. The transition between the raised portions and the recessed portions is gradual and the orifices formed by the holes extending through the upper surface of the substrate support are rounded to eliminate sharp edges and rapid changes in height at the upper surface.

摘要翻译： 本发明通常提供适于提供真空夹紧的支撑构件。 一方面，提供具有上表面的支撑构件，其具有限定内凹部的外凸起部。 内凹部与真空源流体连通。 支撑构件可以包括多个凸起的支撑部分，其具有与其相邻的一个或多个凹部，所述凸起支撑部分在凹部上方具有相同的高度。 凸起部分和凹陷部分之间的过渡是渐进的，并且由延伸穿过衬底支撑件的上表面的孔形成的孔是圆形的，以消除上边缘处的尖锐边缘和高度的快速变化。

公开(公告)号：US06464795B1

公开(公告)日：2002-10-15

申请号：US09563573

申请日：2000-05-03

申请人： Semyon Sherstinsky ,  Calvin Augason ,  Leonel A. Zuniga ,  Jun Zhao ,  Talex Sajoto ,  Leonid Selyutin ,  Joseph Yudovsky ,  Maitreyee Mahajani ,  Steve G. Ghanayem ,  Tai T. Ngo ,  Arnold Kholodenko

发明人： Semyon Sherstinsky ,  Calvin Augason ,  Leonel A. Zuniga ,  Jun Zhao ,  Talex Sajoto ,  Leonid Selyutin ,  Joseph Yudovsky ,  Maitreyee Mahajani ,  Steve G. Ghanayem ,  Tai T. Ngo ,  Arnold Kholodenko

IPC分类号： G23C1600

CPC分类号： C23C16/45521 ,  C23C16/4586 ,  H01L21/67109 ,  H01L21/6838 ,  H01L21/68785

摘要： A support member for supporting a substrate in a process chamber, the support member having a substrate support surface with one or more isolated recessed areas. A vacuum channel and a gas channel are formed in the support member along a common plane and are coupled to a vacuum source and gas source respectively. The gas channel comprises two or more concentrically disposed annular gas channels encompassing the vacuum channel. The vacuum channel is coupled to the support surface, and in particular to the one or more recessed areas, by a plurality of conduits. A portion of the conduits is disposed diametrically exterior to at least one of the annular gas channels and communicates with the vacuum channel via bypass channels.

摘要翻译： 一种用于在处理室中支撑衬底的支撑构件，所述支撑构件具有具有一个或多个隔离的凹陷区域的衬底支撑表面。 真空通道和气体通道沿着公共平面形成在支撑构件中，并且分别耦合到真空源和气体源。 气体通道包括包围真空通道的两个或更多个同心设置的环形气体通道。 真空通道由多个管道联接到支撑表面，特别是连接到一个或多个凹陷区域。 导管的一部分沿直径设置在至少一个环形气体通道的外部，并通过旁通通道与真空通道连通。

公开(公告)号：US20090184093A1

公开(公告)日：2009-07-23

申请号：US12017285

申请日：2008-01-21

申请人： ABHI DESAI ,  Robert T. Hirahara ,  Calvin Augason

发明人： ABHI DESAI ,  Robert T. Hirahara ,  Calvin Augason

IPC分类号： B23K11/00 ,  H05B3/68

CPC分类号： H01L21/68792 ,  H01L21/67103

摘要： An aluminum heated substrate support suitable for use in high temperature substrate processing systems and method for fabricating the same are provided. In one embodiment, an aluminum heated substrate support can include an aluminum body, a stem coupled to the body and a heating element disposed in the body. The body has an average grain size less than about 250 μm. In some embodiments, the stem to body joint is a fully penetrated lap weld that promotes service life of the substrate support.

摘要翻译： 提供了适用于高温基板处理系统的铝加热基板支架及其制造方法。 在一个实施例中，铝加热的衬底支撑件可以包括铝体，连接到身体的杆和设置在身体中的加热元件。 身体的平均粒度小于约250毫米。 在一些实施例中，杆到身体关节是完全穿透的搭接焊缝，其促进衬底支撑件的使用寿命。

公开(公告)号：US09917001B2

公开(公告)日：2018-03-13

申请号：US12017285

申请日：2008-01-21

申请人： Abhi Desai ,  Robert T. Hirahara ,  Calvin Augason

发明人： Abhi Desai ,  Robert T. Hirahara ,  Calvin Augason

IPC分类号： H05B3/68 ,  H01L21/687 ,  H01L21/67

CPC分类号： H01L21/68792 ,  H01L21/67103

摘要： An aluminum heated substrate support suitable for use in high temperature substrate processing systems and method for fabricating the same are provided. In one embodiment, an aluminum heated substrate support can include an aluminum body, a stem coupled to the body and a heating element disposed in the body. The body has an average grain size less than about 250 μm. In some embodiments, the stem to body joint is a fully penetrated lap weld that promotes service life of the substrate support.