公开(公告)号：US20120216598A1

公开(公告)日：2012-08-30

申请号：US13510547

申请日：2010-11-25

申请人： Seok Rae Yoon ,  Seong Kweon Joh ,  Won Young Park ,  Keu Chan Lee ,  Jin Seong Kim ,  Jin Bok Lee ,  Dong Min Moon ,  Kwang Seob Kim

发明人： Seok Rae Yoon ,  Seong Kweon Joh ,  Won Young Park ,  Keu Chan Lee ,  Jin Seong Kim ,  Jin Bok Lee ,  Dong Min Moon ,  Kwang Seob Kim

IPC分类号： G01N7/00

CPC分类号： G01N7/00 ,  H01J49/00

摘要： The present invention relates to a system for measuring an absolute quantity of each component of a gas using a QMS, more particularly to a system for measuring an absolute quantity of each component of a gas using a QMS, which is capable of performing not only a qualitative analysis but also a quantitative analysis in an accurate manner, using just a trace amount of gas introduced through a pinhole. According to the present invention, the productivity of products can be improved, and production management can be performed in an efficient manner, thereby improving industrial competitiveness.

摘要翻译： 本发明涉及一种用于使用QMS来测量气体的每个组分的绝对量的系统，更具体地说，涉及一种使用QMS测量气体的每个组分的绝对量的系统，该系统不仅可以执行 定性分析，而且以准​​确的方式进行定量分析，仅使用通过针孔引入的微量气体。 根据本发明，可以提高产品的生产率，并且可以有效地进行生产管理，从而提高工业竞争力。