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公开(公告)号：US07241992B1
公开(公告)日：2007-07-10
申请号：US11040299
申请日：2005-01-19
IPC分类号： G01N13/16
CPC分类号： G03F7/0002 , G01Q80/00
摘要： A method of amplitude modulated electrostatic polymer nanolithography providing rapid creation of features in a polymer film is disclosed. The nanolithography method of the present invention generates features by mass transport of polymer within an initially uniform, planar film via localized softening of attoliters (102-105 nm3) of polymer by Joule heating enabling high data densities upon the surface of the polymer. This localized Joule heating is accomplished by current flow between the cantilever AFM tip and a conductive wafer upon which the layer of polymer is grown or mounted.
摘要翻译： 公开了一种在聚合物膜中提供快速产生特征的调幅静电聚合物纳米光刻技术。 本发明的纳米光刻方法通过使聚合物在最初均匀的平面薄膜内通过聚集体的局部软化（10-2 -25nm）进行质量传输而产生特征， 3）聚合物，通过焦耳加热，能够在聚合物表面上实现高数据密度。 这种局部焦耳加热是通过悬臂AFM尖端和聚合物层生长或安装在其上的导电晶片之间的电流来实现的。
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公开(公告)号：US07538332B1
公开(公告)日：2009-05-26
申请号：US11217843
申请日：2005-09-01
IPC分类号： H01J37/26
CPC分类号： G03F7/2049 , G01Q80/00
摘要： The method of the present invention utilizes atomic force microscopy techniques (AFM) for the reversible formation of nanoscale polymeric features by localized heating and mechanical deformation, generated through electrostatically mediated interactions across the polymer film between a conductive backplane and the cantilever AFM tip. This technique utilizes a selective lifting/placement of the cantilevered tip in the z direction (perpendicular to the planar surface of the polymer) to produce nanostructures of precise dimensions in contact AFM mode from regions of polymer locally heated by current flow between the cantilever AFM tip and the conductive substrate.
摘要翻译： 本发明的方法利用原子力显微镜技术（AFM）通过局部加热和机械变形可逆形成纳米尺度的聚合物特征，通过在导电背板和悬臂AFM尖端之间的聚合物膜上的静电介导的相互作用产生。 这种技术利用在z方向（垂直于聚合物的平面）上的悬臂尖端的选择性提升/放置，以在接触AFM模式中产生具有精确尺寸的纳米结构，所述纳米结构由局部加热的聚合物区域通过悬臂AFM尖端之间的电流流动 和导电基板。
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