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公开(公告)号:US08574367B2
公开(公告)日:2013-11-05
申请号:US11723707
申请日:2007-03-21
IPC分类号: C23C16/00
CPC分类号: C23C14/12 , C23C14/243
摘要: In an evaporation source, a separable heater is used when an organic thin film is formed on a substrate in order to realize full-colors so that it is possible to correspond to crucibles of various capacities. The evaporation source comprises a crucible in which an organic material which is an organic thin film material is accommodated, and the crucible includes a heating unit and at least one spray nozzle for spraying the organic material onto a substrate. In the heating unit, a heater divided into at least two parts is provided on the external surface of the crucible at uniform intervals, and the heaters are separately disposed with respect to each other, but are connected to each other by connecting members. Therefore, it is not necessary to perform an additional design whenever the capacity of the crucible is changed, it is not necessary to exchange the evaporation source, and it is possible to reduce cost and to improve repairing ability.
摘要翻译: 在蒸发源中,当在基板上形成有机薄膜以实现全色时,可以使用可分离的加热器,从而可以对应于各种容量的坩埚。 蒸发源包括坩埚,其中容纳有机材料作为有机薄膜材料,并且坩埚包括加热单元和用于将有机材料喷射到基底上的至少一个喷嘴。 在加热单元中,以均匀的间隔在坩埚的外表面上设置分为至少两部分的加热器,并且加热器彼此分开设置,但是通过连接构件彼此连接。 因此,只要坩埚的容量变化,就不需要进行额外的设计,不需要更换蒸发源,可以降低成本,提高修理能力。
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公开(公告)号:US20070283890A1
公开(公告)日:2007-12-13
申请号:US11723707
申请日:2007-03-21
IPC分类号: C23C16/00
CPC分类号: C23C14/12 , C23C14/243
摘要: In an evaporation source, a separable heater is used when an organic thin film is formed on a substrate in order to realize full-colors so that it is possible to correspond to crucibles of various capacities. The evaporation source comprises a crucible in which an organic material which is an organic thin film material is accommodated, and the crucible includes a heating unit and at least one spray nozzle for spraying the organic material onto a substrate. In the heating unit, a heater divided into at least two parts is provided on the external surface of the crucible at uniform intervals, and the heaters are separately disposed with respect to each other, but are connected to each other by connecting members. Therefore, it is not necessary to perform an additional design whenever the capacity of the crucible is changed, it is not necessary to exchange the evaporation source, and it is possible to reduce cost and to improve repairing ability.
摘要翻译: 在蒸发源中,当在基板上形成有机薄膜以实现全色时,可以使用可分离的加热器,从而可以对应于各种容量的坩埚。 蒸发源包括坩埚,其中容纳有机材料作为有机薄膜材料,并且坩埚包括加热单元和用于将有机材料喷射到基底上的至少一个喷嘴。 在加热单元中,以均匀的间隔在坩埚的外表面上设置分为至少两部分的加热器,并且加热器彼此分开设置,但是通过连接构件彼此连接。 因此,只要坩埚的容量变化,就不需要进行额外的设计,不需要更换蒸发源,可以降低成本,提高修理能力。
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