公开(公告)号：US20050256601A1

公开(公告)日：2005-11-17

申请号：US11050752

申请日：2005-02-07

申请人： Seung Lee ,  Seung Doh ,  Chung Park ,  Yoo Jang

发明人： Seung Lee ,  Seung Doh ,  Chung Park ,  Yoo Jang

IPC分类号： G05B19/418 ,  G06F19/00

CPC分类号： G05B19/4184 ,  G05B2219/31357 ,  G05B2219/45031 ,  Y02P90/14

摘要： A system to and method of monitoring a condition of a process tool. The system monitors a condition of a process tool to correctly detect a faulty operation or malfunction of the process tool. The system to monitor the condition of the process tool includes a first model storage unit to store one or more good models generated by data associated with the process tool, a second model storage unit to store one or more faulty models generated by the data associated with the process tool, a model selector to receive tool data from the process tool, and to select one of the good models and one of the faulty models in association with the received tool data, and an error detector to receive process data from the process tool, to compare the received process data with the good and faulty models selected by the model selector, and to estimate a condition of the process tool.

摘要翻译： 监控过程工具状态的系统和方法。 系统监控过程工具的状态，以正确检测过程工具的故障操作或故障。 用于监视过程工具的状态的系统包括：第一模型存储单元，用于存储由与处理工具相关联的数据生成的一个或多个良好模型;第二模型存储单元，用于存储由与该过程工具相关联的数据生成的一个或多个故障模型; 过程工具，从过程工具接收工具数据的模型选择器，以及与接收到的工具数据相关联地选择一个良好模型和一个故障模型;以及错误检测器，用于从过程工具接收过程数据 ，以将所接收到的过程数据与由模型选择器选择的良好和有缺陷的模型进行比较，并估计过程工具的状况。