ESD protection devices and methods for reducing trigger voltage

    公开(公告)号:US07009252B2

    公开(公告)日:2006-03-07

    申请号:US10353372

    申请日:2003-01-28

    IPC分类号: H01L26/62

    CPC分类号: H01L27/027 H01L27/0203

    摘要: ESD protection devices and methods to form them are provided in this invention. By employing the thin gate oxide fabricated by a dual gate oxide process, ESD protection devices with a lower trigger voltage are provided. The NMOS for ESD protection according to the present invention has islands with thin gate oxides and a control gate with a thick gate oxide. These islands overlap the drain region of the NMOS to reduce the breakdown voltage of the PN junction in the drain region, thereby reducing the ESD trigger voltage and improving the ESD protection level of the NMOS. Furthermore, the invention is applicable to general integrated-circuit processes as well as various ESD protection devices.

    ESD protection devices and methods for reducing trigger voltage

    公开(公告)号:US06573568B2

    公开(公告)日:2003-06-03

    申请号:US09871999

    申请日:2001-06-01

    IPC分类号: H01L2976

    CPC分类号: H01L27/027 H01L27/0203

    摘要: ESD protection devices and methods to form them are provided in this invention. By employing the thin gate oxide fabricated by a dual gate oxide process, ESD protection devices with a lower trigger voltage are provided. The NMOS for ESD protection according to the present invention has islands with thin gate oxides and a control gate with a thick gate oxide. These islands overlap the drain region of the NMOS to reduce the breakdown voltage of the PN junction in the drain region, thereby reducing the ESD trigger voltage and improving the ESD protection level of the NMOS. Furthermore, the invention is applicable to general integrated-circuit processes as well as various ESD protection devices.