公开(公告)号：US20220307122A1

公开(公告)日：2022-09-29

申请号：US17642480

申请日：2020-09-17

Applicant: Shibaura Machine Co., Ltd.

Inventor： Satoshi FUKUYAMA ,  Yoshiaki KURIHARA ,  Takeshi NAMBA ,  Koichi NOSE

IPC: C23C14/34 ,  C23C4/134

Abstract: A surface treatment device includes a housing unit, a surface treatment element, and a stirring element. The housing unit houses a workpiece. The surface treatment element performs surface treatment on the workpiece housed in the housing unit. The stirring element stirs the workpiece when the surface treatment element performs the surface treatment on the workpiece.

公开(公告)号：US20220389565A1

公开(公告)日：2022-12-08

申请号：US17760569

申请日：2020-09-09

Applicant: Shibaura Machine Co., Ltd.

Inventor： Yoshiaki KURIHARA ,  Takeshi NAMBA ,  Satoshi FUKUYAMA ,  Koichi NOSE

IPC: C23C14/54 ,  C23C14/34

Abstract: A flow rate adjustment valve includes: a flow path portion which has one end at which an opening is formed, and in which a fluid flows; a lifting valve which is configured to close the opening by covering an entire region of the opening, open the opening by being separated from the opening in an opening direction of the opening, and change a distance from the opening in the opening direction to change a flow area with respect to the opening; and a servo actuator as a driver which moves the lifting valve in the opening direction based on a predetermined detection value.