公开(公告)号：US20250153134A1

公开(公告)日：2025-05-15

申请号：US18838444

申请日：2023-01-16

Applicant: Shibaura Machine Co., Ltd.

Inventor： Takeshi NAMBA ,  Kazuhiro FUKADA ,  Yoshiaki KURIHARA

IPC: B01J19/08 ,  B01J19/18 ,  C23C14/22 ,  C23C14/34

Abstract: A surface treatment apparatus includes a treatment electrode, a housing unit that is installed at a position facing the treatment electrode and is rotatable around a rotation shaft having an inclination with respect to a horizontal direction while housing a workpiece, a chamber that houses the treatment electrode and the housing unit, a surface treatment device that performs surface treatment on the workpiece housed in the housing unit and includes the treatment electrode, and a rotation device that rotates the housing unit around the rotation shaft when the surface treatment device performs the surface treatment on the workpiece.

公开(公告)号：US20240318303A1

公开(公告)日：2024-09-26

申请号：US18580544

申请日：2022-09-20

Applicant: Shibaura Machine Co., Ltd.

Inventor： Kazuhiro FUKADA ,  Yoshiaki KURIHARA ,  Takeshi NAMBA ,  Satoshi FUKUYAMA ,  Mitsunori KOKUBO

IPC: C23C14/56 ,  C23C14/34 ,  C23C14/50

CPC classification number: C23C14/568 ,  C23C14/34 ,  C23C14/50 ,  C23C14/566

Abstract: A surface treatment apparatus includes a placement part on which a workpiece is placed, a first housing part, a second housing part, and a conveyance part. The first housing part houses the workpiece placed on the placement part. The second housing part houses the workpiece placed on the placement part. The second housing part includes a surface treatment part performing at least one type of surface treatment. The conveyance part conveys the workpiece placed on the placement part in a longitudinal direction of the first housing part or the second housing part. The surface treatment apparatus performs surface treatment on the workpiece in a state where the second housing part is a single body or in a state where the first housing part and the second housing part are plurally coupled in a conveyance direction of the conveyance part.

公开(公告)号：US20220389565A1

公开(公告)日：2022-12-08

申请号：US17760569

申请日：2020-09-09

Applicant: Shibaura Machine Co., Ltd.

Inventor： Yoshiaki KURIHARA ,  Takeshi NAMBA ,  Satoshi FUKUYAMA ,  Koichi NOSE

IPC: C23C14/54 ,  C23C14/34

Abstract: A flow rate adjustment valve includes: a flow path portion which has one end at which an opening is formed, and in which a fluid flows; a lifting valve which is configured to close the opening by covering an entire region of the opening, open the opening by being separated from the opening in an opening direction of the opening, and change a distance from the opening in the opening direction to change a flow area with respect to the opening; and a servo actuator as a driver which moves the lifting valve in the opening direction based on a predetermined detection value.

公开(公告)号：US20220307122A1

公开(公告)日：2022-09-29

申请号：US17642480

申请日：2020-09-17

Applicant: Shibaura Machine Co., Ltd.

Inventor： Satoshi FUKUYAMA ,  Yoshiaki KURIHARA ,  Takeshi NAMBA ,  Koichi NOSE

IPC: C23C14/34 ,  C23C4/134

Abstract: A surface treatment device includes a housing unit, a surface treatment element, and a stirring element. The housing unit houses a workpiece. The surface treatment element performs surface treatment on the workpiece housed in the housing unit. The stirring element stirs the workpiece when the surface treatment element performs the surface treatment on the workpiece.

公开(公告)号：US20250129464A1

公开(公告)日：2025-04-24

申请号：US18683873

申请日：2022-09-08

Applicant: Shibaura Machine Co., Ltd.

Inventor： Mitsunori KOKUBO ,  Satoshi FUKUYAMA ,  Kazuhiro FUKADA ,  Rintaro SUEKI ,  Yoshiaki KURIHARA ,  Takeshi NAMBA

IPC: C23C14/00 ,  C23C14/54

Abstract: A surface treatment apparatus includes a housing unit that houses at least one workpiece, a placement device in which the workpiece is placed such that the workpiece is substantially orthogonal to a normal direction of an outer peripheral surface of a rotating shaft extending in a horizontal direction, and faces outward, a first rotating device that rotates the placement device) around the rotating shaft in a state where the placement device is housed in the housing unit, a surface treatment device that extends inside the housing unit and in parallel with the rotating shaft and performs surface treatment by supplying gas to a surface of the workpiece, and an exhaust device that is provided inside the housing unit at a position different from a position where the surface treatment device is provided, and adjusts pressure and exhausts gas inside the housing unit.

公开(公告)号：US20230304143A1

公开(公告)日：2023-09-28

申请号：US18040235

申请日：2021-07-12

Applicant: Shibaura Machine Co., Ltd.

Inventor： Mitsunori KOKUBO ,  Satoshi FUKUYAMA ,  Yoshiaki KURIHARA ,  Takeshi NAMBA

IPC: C23C14/50 ,  C23C14/34 ,  C23C14/56

CPC classification number: C23C14/505 ,  C23C14/34 ,  C23C14/56

Abstract: In a surface treatment apparatus, a conveyance device houses a placement device having a treated member placed thereon, into a housing unit. A rotation device rotates the treated member to face a direction facing a surface treatment device in a predetermined rotation pattern, in a state in which the placement device is housed in the housing unit.