公开(公告)号：US5127734A

公开(公告)日：1992-07-07

申请号：US642451

申请日：1991-01-17

申请人： Shigenori Ohi ,  Yukio Kondou ,  Kenichi Noguchi ,  Shigeo Mizukawa ,  Hiroshi Shibamoto ,  Masane Suzuki

发明人： Shigenori Ohi ,  Yukio Kondou ,  Kenichi Noguchi ,  Shigeo Mizukawa ,  Hiroshi Shibamoto ,  Masane Suzuki

IPC分类号： G01B9/02

CPC分类号： G01B9/02052 ,  G01B11/2441 ,  G01B9/02057

摘要： A laser interferometer for inspecting the surface condition of a specimen by irradiating the specimen on a specimen support mechanism with a laser beam projected thereto through a reference plate, and observing the interference fringe produced by interference between reflected light from a reference surface of the reference plate and a surface of the specimen under inspection, the laser interferometer includes: an interferometer housing accommodating therein an optical laser beam guide member and an optical interference fringe imaging member, and is provided with a laser beam guide portion in a wall portion thereof; a laser tube mount member of a cylindrical form projected on the outer side of the housing and positioned in such a manner so as to circumvent the laser guide portion; and a laser tube detachably fitted in the laser tube mount member.

摘要翻译： 一种激光干涉仪，用于通过用通过参考板投射的激光束将样本照射在样本支撑机构上来检查样本的表面状态，并且观察由参考板的参考表面的反射光之间的干涉产生的干涉条纹 所述激光干涉仪包括：容纳光学激光束引导部件和光学干涉条纹成像部件的干涉仪壳体，在其壁部设置有激光引导部; 圆柱形的激光管安装部件突出在壳体的外侧上，并以这样的方式定位成围绕激光引导部分; 以及可拆卸地装配在激光管安装构件中的激光管。