公开(公告)号：US06583620B2

公开(公告)日：2003-06-24

申请号：US09902947

申请日：2001-07-11

申请人： Shigeo Honda ,  Hideyuki Yamane ,  Yoshimi Enoki ,  Shigeki Wagata

发明人： Shigeo Honda ,  Hideyuki Yamane ,  Yoshimi Enoki ,  Shigeki Wagata

IPC分类号： G01R3302

CPC分类号： G01R33/10 ,  Y10T428/11

摘要： A plane magnetic sensor or a plane magnetic sensor for a multidimensional magnetic field analysis which can measure a magnetic field ever a wide area in a short time is provided. A plane magnetic sensor 10 according to the present invention comprises a sensing layer 11 made of a magnetoresistance effect film formed in a planar state with an arbitrary size, to pass a current therethrough due to a tunneling effect only when voltage reaches or exceeds a predetermined value, and to change its resistance value to show a giant magnetoresistance effect when directions of magnetization of magnetic fine particles change according to the strength of a magnetic field, and conductor layers 12, 13 laminated on respective surfaces of the magnetoresistance effect film and are made of a plurality of line conductor films 12a, 13a formed in linear shapes along directions of the respective surfaces with predetermined intervals therebetween. The line conductor films 12a of one conductor layer 12 and the line conductor films 13a of the other conductor layer 13 are arranged to intersect to each other in plan view, with the magnetoresistance effect film therebetween.

摘要翻译： 提供了一种用于多维磁场分析的平面磁传感器或平面磁传感器，其可以在短时间内测量广域的磁场。 根据本发明的平面磁传感器10包括由平面状态形成任意尺寸的磁阻效应膜制成的感测层11，仅在电压达到或超过预定值时由于隧道效应而通过电流 ，并且当磁性微粒的磁化方向根据磁场的强度而变化时，改变其电阻值以显示出巨大的磁阻效应，以及层叠在磁阻效应膜的各个表面上的导体层12,13由 沿着各个表面的方向以预定的间隔沿线状形成的多条线状导体膜12a，13a。 一个导体层12的线路导体膜12a和另一个导体层13的线路导体膜13a布置成在平面图中彼此相交，其间具有磁阻效应膜。

公开(公告)号：US5169418A

公开(公告)日：1992-12-08

申请号：US765809

申请日：1991-09-26

申请人： Shigeo Honda ,  Hiroaki Abe ,  Kazutomo Isono

发明人： Shigeo Honda ,  Hiroaki Abe ,  Kazutomo Isono

IPC分类号： F24F7/06 ,  F24F3/16

CPC分类号： F24F3/161

摘要： A clean room arrangement comprises a clean room having an upper portion and a lower portion. Clean air is introduced into the upper portion of the clean room, flows downward and expelled from the lower portion of the clean room. An air recirculation passage is connected to the clean room such that the lower portion of the clean room is communicated with the upper portion of the clean room. A heat source is provided in the air recirculation passage to generate an ascending flow of air in the air recirculation passage so that the air descends in the clean room due to natural convection.