公开(公告)号：US20120279944A1

公开(公告)日：2012-11-08

申请号：US13551133

申请日：2012-07-17

申请人： Shigeru KASAI ,  Hiroyuki MIYASHITA ,  Masatake YONEDA ,  Tomohiro SUZUKI ,  Sumi TANAKA ,  Masamichi NOMURA ,  Miwa SHIMIZU

发明人： Shigeru KASAI ,  Hiroyuki MIYASHITA ,  Masatake YONEDA ,  Tomohiro SUZUKI ,  Sumi TANAKA ,  Masamichi NOMURA ,  Miwa SHIMIZU

IPC分类号： H05B1/00

CPC分类号： H01L21/67115 ,  H01L21/67109 ,  H01L31/1864 ,  Y02E10/50 ,  Y02P70/521

摘要： Provided is an annealing apparatus, which is free from a problem of reduced light energy efficiency resulted by the reduction of light emission amount due to a heat generation and capable of maintaining stable performance. The apparatus includes: a processing chamber 1 for accommodating a wafer W; heating sources 17a and 17b including LEDs 33 and facing the surface of the wafer W to irradiate light on the wafer W; light-transmitting members 18a and 18b arranged in alignment with the heating sources 17a and 17b to transmit the light emitted from the LEDs 33; cooling members 4a and 4b supporting the light-transmitting members 18a and 18b at opposite side to the processing chamber 1 to make direct contact with the heating sources 17a and 17b and made of a material of high thermal conductivity; and a cooling mechanism for cooling the cooling members 4a and 4b with a coolant.

摘要翻译： 提供一种退火装置，其不会由于发热而导致的发光量的降低而导致光能效率降低的问题，并且能够保持稳定的性能。 该装置包括：用于容纳晶片W的处理室1; 加热源17a和17b包括LED33并面向晶片W的表面以将光照射在晶片W上; 与发热源17a和17b对准布置的透光部件18a和18b，以透射从LED33发出的光; 在与处理室1相反的一侧支撑透光部件18a和18b的冷却部件4a和4b与加热源17a和17b直接接触并由导热性高的材料制成; 以及用冷却剂冷却冷却部件4a，4b的冷却机构。

公开(公告)号：US20090243906A1

公开(公告)日：2009-10-01

申请号：US12404835

申请日：2009-03-16

申请人： Hiroyuki MIYASHITA

发明人： Hiroyuki MIYASHITA

IPC分类号： H03M1/12 ,  H03F3/45 ,  H03K17/00

CPC分类号： H03F3/45183 ,  H03F2203/45702 ,  H03F2203/45726 ,  H03K3/356139

摘要： In some examples, a differential comparator includes a differential amplifier configured to output differential output signals, a first switch portion configured to input the differential output signals from the differential amplifier and output the differential output signals from output terminals while alternatively changing over the output terminals, a latch portion configured to update and latch the differential output signals from the output terminals of the first switch portion, and a second switch portion configured to input output signals from the latch portion and output the latched output signals. The first switch portion and the second switch portion are changed over complementarily so that the differential output signals from the differential amplifier are always outputted from the same first and second output terminals of the second switch portion respectively.

摘要翻译： 在一些示例中，差分比较器包括：差分放大器，被配置为输出差分输出信号;第一开关部分，被配置为从差分放大器输入差分输出信号，并且在输出端子交替地切换时输出来自输出端子的差分输出信号， 锁存部分，被配置为更新并锁存来自第一开关部分的输出端的差分输出信号;以及第二开关部分，被配置为输入来自锁存部分的输出信号并输出​​锁存的输出信号。 第一开关部分和第二开关部分互补地改变，使得来自差分放大器的差分输出信号总是分别从第二开关部分的相同的第一和第二输出端子输出。