公开(公告)号：US20110272096A1

公开(公告)日：2011-11-10

申请号：US13103635

申请日：2011-05-09

申请人： Shigeru SERIKAWA ,  Ryuta SUZUKI ,  Toshiaki SUGITA ,  Kiyotaka HORIE

发明人： Shigeru SERIKAWA ,  Ryuta SUZUKI ,  Toshiaki SUGITA ,  Kiyotaka HORIE

IPC分类号： C23F1/08 ,  G01N21/88

CPC分类号： G01N21/956

摘要： The present invention specifies a stamper that causes a defect at an early stage by inspecting a surface of a patterned medium and failure in molding of a pattern shape of a stamper at high speed or extracting a defect resulting from the stamper based upon a defect of a pattern on a disk so as to prevent the occurrence of a large quantity of failure beforehand. In the present invention, in order to inspect a pattern shape, wide-band light including a deep ultraviolet ray is radiated onto an inspected object, reflected light generated from the inspected object irradiated by an radiating optical system is detected, and it is judged whether the channel spectral data having fixed wavelength width of the detected reflected light exists within set limit or not. Similarly, the stamper is judged defective when the reflected light is diffracted and detected, detected spectral reflectance waveform data is compared with reference data, a defective area of a pattern of a resist film is extracted and the defective area acquired in the inspection data of the current inspection is the same as defective areas acquired in the inspection data of plural substrates inspected using the same stamper.

摘要翻译： 本发明通过检查图案化介质的表面和高速成型压模的图案形状的失败或提取由于压模产生的缺陷而在早期引起缺陷的压模 以防止事故发生大量故障。 在本发明中，为了检查图案形状，将包含深紫外线的宽带光照射到检查对象物上，检测由被检查物体产生的被辐射光学系统照射的反射光，并判断是否 检测到的反射光的固定波长宽度的通道光谱数据存在于设定的限制内。 类似地，当反射光被衍射和检测时，压模被判定为有缺陷，检测到的光谱反射率波形数据与参考数据进行比较，提取抗蚀剂膜的图案的缺陷区域以及在检测数据中获取的缺陷区域 当前检查与使用同一压模检查的多个基板的检查数据中获取的缺陷区域相同。

公开(公告)号：US20120075624A1

公开(公告)日：2012-03-29

申请号：US13210494

申请日：2011-08-16

申请人： Ryuta SUZUKI ,  Masayuki YAMAMOTO ,  Toshiaki SUGITA

发明人： Ryuta SUZUKI ,  Masayuki YAMAMOTO ,  Toshiaki SUGITA

IPC分类号： G01N21/00

CPC分类号： G01N21/95

摘要： In magnetic disk inspection, it is made possible to perform the total operation in which magnetic disks taken out from a cassette are inspected on both surfaces thereof, classified by the grades according to the inspection results and returned again to corresponding cassettes, while maintaining high throughput. To achieve such inspection, a plurality of uninspected boards are put on a plurality of corresponding rotation-drive portions at a plurality of corresponding board taking-out and supply positions in a magnetic disk inspection apparatus and are transferred to a plurality of corresponding inspection positions. The boards are optically inspected while rotating. The optically inspected boards are transferred to the plurality of corresponding board taking-out and supply positions and the plurality of transferred boards are taken out. The taken-out boards are sorted according to the optical inspection results and stored in the corresponding cassettes into which inspected boards are stored.

摘要翻译： 在磁盘检查中，可以进行从两个表面检查从磁带盒中取出的磁盘的整个操作，并根据检查结果按等级分类并再次返回到相应的盒，同时保持高的吞吐量 。 为了实现这种检查，在磁盘检查装置中的多个相应的板取出和供给位置上，将多个未预期的板放在多个相应的旋转驱动部分上，并被传送到多个对应的检查位置。 板在旋转时进行光学检查。 光学检测板转移到多个对应的板取出和供给位置，并且多个转印板被取出。 取出的板根据光学检查结果进行分类，并存储在存储有检查板的相应的盒中。

公开(公告)号：US20120087040A1

公开(公告)日：2012-04-12

申请号：US13267043

申请日：2011-10-06

申请人： Ryuta SUZUKI ,  Masayuki Yamamoto ,  Toshiaki Sugita

发明人： Ryuta SUZUKI ,  Masayuki Yamamoto ,  Toshiaki Sugita

IPC分类号： G11B23/04

CPC分类号： G11B33/00 ,  G01R33/1207 ,  G11B33/12

摘要： The present invention provides a magnetic disk inspection method and its system suitable to supply magnetic disks stored in a cassette to a plurality of inspection devices and collects inspected magnetic disks from the inspection devices. The cassette in which uninspected magnetic disks are stored is taken out from a cassette housing unit and transferred to any one of a plurality of optical inspection units. The optical disk inspection unit to which the cassette with the uninspected magnetic disks stored therein is transferred, takes out an uninspected magnetic disk and inspects both surfaces thereof. The magnetic disk whose both surfaces are inspected and which is determined as a non-defective product is stored in a cassette for collecting non-defective magnetic disks. The cassette is transferred from the optical inspection unit to the cassette housing unit. The transferred cassette is housed in the cassette housing unit.

摘要翻译： 本发明提供了一种磁盘检查方法及其系统，其适用于将存储在盒中的磁盘提供给多个检查装置，并从检查装置收集检查的磁盘。 存储非预期磁盘的盒式磁带从盒式存储单元中取出并传送到多个光学检查单元中的任意一个。 将其中存储有未预期磁盘的盒带转移到的光盘检查单元取出未检测的磁盘并检查其两个表面。 检查其两个表面并被确定为无缺陷产品的磁盘被存储在用于收集无缺陷磁盘的盒中。 盒式光盘从光学检测单元传送到盒式存储单元。 转移的盒式磁带被容纳在盒式存储单元中。

公开(公告)号：US20120154798A1

公开(公告)日：2012-06-21

申请号：US13332598

申请日：2011-12-21

申请人： Ryuta SUZUKI ,  Yu YANAKA ,  Yu KUSAKA

发明人： Ryuta SUZUKI ,  Yu YANAKA ,  Yu KUSAKA

IPC分类号： G01N21/55

CPC分类号： G01N21/55 ,  G01N21/956

摘要： In an inspection apparatus that inspects both surfaces of a patterned media disk, to perform inspection while maintaining a high level of throughput, a patterned media disk inspection apparatus of the present invention includes an optical inspection unit, a table unit that includes plural substrate rotation drive units on which a substrate is mounted and rotated and rotates and conveys the substrates mounted on the substrate rotation drive units between a position at which the substrate is inspected by the optical inspection unit and a position at which the substrate is taken out and supplied, a substrate reversing unit, a cassette unit that accommodates substrates, and a substrate handling unit that takes out an uninspected substrate from the cassette unit and supplies the uninspected substrate to the table unit, and further stores a substrate, both surfaces of which have already been inspected, in the cassette unit.

摘要翻译： 在检查图案化介质盘的两个表面的检查装置中，为了在保持高水平的生产量的同时执行检查，本发明的图案化介质盘检查装置包括光学检查单元，台部单元，其包括多个基板旋转驱动 单元，其上安装和旋转基板并旋转并将安装在基板旋转驱动单元上的基板传送到由光学检查单元检查基板的位置和基板被取出和供应的位置之间; 基板反转单元，容纳基板的盒单元以及从盒单元取出未预期基板并将未预期基板提供到台单元的基板处理单元，并且还存储两个表面已被检查的基板 ，在盒式单元中。