公开(公告)号：US06475823B1

公开(公告)日：2002-11-05

申请号：US09585354

申请日：2000-06-02

申请人： Shigeru Sakano ,  Akira Suzuki ,  Takahito Kiriyama ,  Seiichi Tajima ,  Ikuo Katoh

发明人： Shigeru Sakano ,  Akira Suzuki ,  Takahito Kiriyama ,  Seiichi Tajima ,  Ikuo Katoh

IPC分类号： H01L2100

CPC分类号： H03H9/177 ,  H03H3/02 ,  H03H9/1035 ,  H03H9/132 ,  H03H9/56 ,  Y10T29/42

摘要： The invention is directed to piezoelectric device having a vibration space that achieves a high degree of airtightness which is not readily reduced, and a manufacturing method thereof. First and second hollow layers are formed at first and second surfaces of a piezoelectric substrate to form first and second cavities around first and second electrodes respectively. The first and second cavities each have a uniform width and extend between a first surface and an opposing second surface of the first and second hollow layers respectively, around vibration portions of the piezoelectric element. First and second sealing layers are each formed on the second surface of the first and second hollow layers to seal the first and second cavities.

摘要翻译： 本发明涉及一种压电装置及其制造方法，所述压电装置具有能够实现难以降低的高气密性的振动空间。 第一和第二中空层形成在压电基板的第一和第二表面处，分别围绕第一和第二电极形成第一和第二空腔。 第一和第二空腔各自具有均匀的宽度，并分别围绕压电元件的振动部分在第一和第二中空层的第一表面和相对的第二表面之间延伸。 第一和第二密封层各自形成在第一和第二中空层的第二表面上，以密封第一和第二空腔。