公开(公告)号：US07660688B2

公开(公告)日：2010-02-09

申请号：US11896903

申请日：2007-09-06

申请人： Nobuhiro Ishikawa ,  Shingo Kiyotani

发明人： Nobuhiro Ishikawa ,  Shingo Kiyotani

IPC分类号： G01C17/38 ,  G01B5/004 ,  G01N19/02

CPC分类号： G01B21/045

摘要： A surface-profile measuring instrument includes a movement-estimating unit that estimates a movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit to calculate an estimated movement state quantity, and a correction calculating unit that corrects a detection value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement-estimating unit. The movement-estimating unit has a nominal model setting unit in which a nominal model from the scanning vector commanding unit to the probe is set. The correction calculating unit includes a correction-amount calculating unit that calculates a correction amount for correcting a measurement error generated by a deformation of the drive mechanism in accordance with the movement thereof and a measurement data synthesizing unit that synthesizes the detection value of the drive sensor and the displacement sensor and the calculated correction-amount calculated by the correction-amount calculating unit.

摘要翻译： 表面轮廓测量仪器包括：运动估计单元，其根据由扫描矢量指令单元发出的扫描矢量指令来估计驱动机构的运动状态，以计算估计运动状态量;以及校正计算单元， 驱动传感器的检测值，其根据由所述运动估计单元计算出的估计移动状态量。 运动估计单元具有设定从扫描矢量指令单元到探头的标称模型的标称模型设定单元。 校正计算单元包括校正量计算单元，该校正量计算单元计算用于校正根据其驱动机构的变形而产生的测量误差的校正量;以及测量数据合成单元，其将驱动传感器的检测值 以及所述位移传感器和由所述校正量计算单元计算出的所计算的校正量。

公开(公告)号：US20080065341A1

公开(公告)日：2008-03-13

申请号：US11896903

申请日：2007-09-06

申请人： Nobuhiro Ishikawa ,  Shingo Kiyotani

发明人： Nobuhiro Ishikawa ,  Shingo Kiyotani

IPC分类号： G06F19/00 ,  G01C25/00

CPC分类号： G01B21/045

摘要： A surface-profile measuring instrument includes a movement-estimating unit (600) that estimates an movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit (220) to calculate an estimated movement state quantity, and a correction calculating unit (700) that corrects a detection value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement estimating unit (600).The movement-estimating unit (600) has a nominal model setting unit (311) in which a nominal model as a frequency transfer characteristics from the scanning vector commanding unit to the probe of the scanning probe is set. The correction-calculating unit (700) includes a correction-amount calculating unit (720) that calculates a correction amount for correcting a measurement error generated by a deformation of the drive mechanism in accordance with the movement thereof and a measurement data synthesizing unit (430) that synthesizes the detection value of the drive sensor and the displacement sensor and the calculated correction-amount calculated by the correction-amount calculating unit (720).

摘要翻译： 表面轮廓测量仪器包括：运动估计单元，其根据由扫描矢量指令单元（220）发出的扫描矢量指令来估计驱动机构的运动状态，以计算估计运动状态量;以及 校正计算单元，其根据由所述移动估计单元计算出的估计移动状态量来校正驱动传感器的检测值。 运动估计单元（600）具有标称模型设定单元（311），其中设置了作为扫描矢量指令单元的扫描探针的探头的频率传递特性的标称模型。 校正计算单元（700）包括校正量计算单元（720），该校正量计算单元计算用于校正由驱动机构的变形产生的测量误差的校正量，以及测量数据合成单元（430） ），其合成驱动传感器和位移传感器的检测值以及由校正量计算单元计算的计算出​​的校正量（720）。

公开(公告)号：US07471056B2

公开(公告)日：2008-12-30

申请号：US11291452

申请日：2005-12-01

申请人： Shingo Kiyotani ,  Nobuhiro Ishikawa

发明人： Shingo Kiyotani ,  Nobuhiro Ishikawa

IPC分类号： G05D23/275

CPC分类号： G05B19/19 ,  G05B2219/42104

摘要： A control device includes a first switch (400) by which an input signal to a motor speed control loop (910) is selected from a signal of a position control loop (300) and a signal of the speed control loop (200), and a switch controller (500) that controls switching of the first switch (400), so that the first switch (400) can switch between a quadruple loop (a current control loop, the motor speed control loop, the speed control loop (200) and the position control loop (300)) with the speed control loop (200) embedded therein, and a triple loop (the current control loop, the motor speed control loop and the position control loop (300)) without the speed control loop (200), corresponding to a transient state and a steady state.

摘要翻译： 控制装置包括第一开关（400），通过该第一开关从位置控制回路（300）的信号和速度控制回路（200）的信号中选择到电动机速度控制回路（910）的输入信号，以及 开关控制器（500），其控制所述第一开关（400）的切换，使得所述第一开关（400）可以在四极环（电流控制回路，所述电动机速度控制回路，所述速度控制回路） 和位置控制回路（300））以及三速回路（电流控制回路，电动机速度控制回路和位置控制回路（300）），没有速度控制回路（300） 200），对应于瞬态和稳态。

公开(公告)号：US20060119307A1

公开(公告)日：2006-06-08

申请号：US11291452

申请日：2005-12-01

申请人： Shingo Kiyotani ,  Nobuhiro Ishikawa

发明人： Shingo Kiyotani ,  Nobuhiro Ishikawa

IPC分类号： G05D23/275

CPC分类号： G05B19/19 ,  G05B2219/42104

摘要： A control device includes a first switch (400) by which an input signal to a motor speed control loop (910) is selected from a signal of a position control loop (300) and a signal of the speed control loop (200), and a switch controller (500) that controls switching of the first switch (400), so that the first switch (400) can switch between a quadruple loop (a current control loop, the motor speed control loop, the speed control loop (200) and the position control loop (300)) with the speed control loop (200) embedded therein, and a triple loop (the current control loop, the motor speed control loop and the position control loop (300)) without the speed control loop (200), corresponding to a transient state and a steady state.

摘要翻译： 控制装置包括第一开关（400），通过该第一开关从位置控制回路（300）的信号和速度控制回路（200）的信号中选择到电动机速度控制回路（910）的输入信号，以及 开关控制器（500），其控制所述第一开关（400）的切换，使得所述第一开关（400）可以在四极环（电流控制回路，所述电动机速度控制回路，所述速度控制回路） 和位置控制回路（300））以及三速回路（电流控制回路，电动机速度控制回路和位置控制回路（300）），没有速度控制回路（300） 200），对应于瞬态和稳态。

公开(公告)号：US20100174504A1

公开(公告)日：2010-07-08

申请号：US12651082

申请日：2009-12-31

申请人： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

发明人： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

IPC分类号： G01B5/008 ,  G06F19/00

CPC分类号： G01B21/045

摘要： A coordinate measuring machine includes: a probe that has a contact point capable of movement within a predetermined range; a movement mechanism for moving the probe; and a controller for controlling the movement mechanism. The controller has a measurement value calculating unit for calculating a position of the contact point based on a displacement of the movement mechanism and a displacement of the probe. The measurement value calculating unit includes: a correction parameter calculator for calculating a correction parameter for correcting the displacement of the probe based on a measurement condition in measuring an object; a corrector for correcting the displacement of the probe based on the correction parameter; and a displacement synthesizing unit that synthesizes the displacement of the movement mechanism and the displacement of the probe corrected by the corrector to calculate the position of the contact point.

摘要翻译： 坐标测量机包括：具有能够在预定范围内移动的接触点的探头; 用于移动探针的移动机构; 以及用于控制移动机构的控制器。 控制器具有测量值计算单元，用于基于移动机构的位移和探头的位移来计算接触点的位置。 测量值计算单元包括：校正参数计算器，用于基于测量对象中的测量条件来计算用于校正探针的位移的校正参数; 校正器，用于基于校正参数校正探针的位移; 以及位移合成单元，其合成所述移动机构的位移和由所述校正器校正的所述探头的位移，以计算所述接触点的位置。

公开(公告)号：US06215225B1

公开(公告)日：2001-04-10

申请号：US09171194

申请日：1998-10-14

申请人： Nobuhiro Ishikawa ,  Kunitoshi Nishimura

发明人： Nobuhiro Ishikawa ,  Kunitoshi Nishimura

IPC分类号： H01L4108

CPC分类号： G01B7/012

摘要： A stylus has a piezoelectric element support part to support and fix piezoelectric elements. The piezoelectric element support part is a regular polygonal body and its cross section orthogonal to the axis of the stylus is made a regular polygon. The piezoelectric elements are mounted on each side surface of the regular polygonal body, respectively. Sums and difference signals outputted from the piezoelectric elements are produced and a touch detection signal is generated based on the produced signals.

摘要翻译： 触针具有用于支撑和固定压电元件的压电元件支撑部分。 压电元件支撑部是规则的多边形体，并且其与触笔的轴线正交的横截面被制成规则的多边形。 压电元件分别安装在正多边形体的每个侧表面上。 产生从压电元件输出的和值和差分信号，并且基于产生的信号产生触摸检测信号。

公开(公告)号：US5949257A

公开(公告)日：1999-09-07

申请号：US947344

申请日：1997-10-08

申请人： Nobuhiro Ishikawa

发明人： Nobuhiro Ishikawa

IPC分类号： G01D1/18 ,  G01B7/00 ,  G01B21/00 ,  H03K5/08 ,  H03K5/153 ,  H03K17/945

CPC分类号： G01B7/002 ,  H03K5/082

摘要： The DC sensor signal S, on which a low frequency waviness component S1 and a high frequency noise component S2, is obtained by amplitude detecting for a sinusoidal output signal from a touch signal probe. For generating a touch trigger signal TG at an sbrupt DC level transition of the DC sensor signal S, the signal S is input to a LPF 21 to output a signal (S0+S1), where S0 is a DC offset component, and S1 is a low frequency waviness component. The amplitude transforming circuit 22 multiplies the signal (S0+S1) by a coefficient k to generate a reference signal k(S0+S1). The comparator 23 compares the DC sensor signal S with the reference signal to output the touch trigger signal TG at the abrupt DC transition point of the DC sensor signal S.

摘要翻译： 通过对来自触摸信号探针的正弦输出信号进行振幅检测，获得低频波纹成分S1和高频噪声成分S2的DC传感器信号S。 为了在直流传感器信号S的直流电平转换中产生触摸触发信号TG，信号S被输入到LPF 21以输出信号（S0 + S1），其中S0是DC偏移分量，S1是 低频波纹分量。 振幅变换电路22将信号（S0 + S1）乘以系数k以生成参考信号k（S0 + S1）。 比较器23将DC传感器信号S与参考信号进行比较，以在直流传感器信号S的突变DC转变点输出触摸触发信号TG。

公开(公告)号：US08332173B2

公开(公告)日：2012-12-11

申请号：US12453245

申请日：2009-05-04

申请人： Nobuhiro Ishikawa

发明人： Nobuhiro Ishikawa

IPC分类号： G01C17/38 ,  G01P21/00

CPC分类号： G01B21/045

摘要： A coordinate measuring machine includes: a probe provided with a measurement piece; a moving mechanism that effects a scanning movement of the probe; and a host computer for controlling the moving mechanism. The host computer includes a displacement acquiring unit for acquiring a displacement of the moving mechanism and a measurement value calculating unit for calculating a measurement value. The measurement value calculating unit includes a correction-amount calculating unit for calculating a correction amount for correcting a position error of the measurement piece and a correcting unit for correcting the position error of the measurement piece based on the displacement of the moving mechanism and the correction amount. The correction-amount calculating unit calculates a translation-correction amount for correcting a translation error of the probe at a reference point on the probe and a rotation-correction amount for correcting a rotation error of the probe according to a rotation angle of the probe around the reference point and a length of the probe from the reference point to the measurement piece.

摘要翻译： 坐标测量机包括：具有测量件的探头; 移动机构，其实现探针的扫描运动; 以及用于控制移动机构的主计算机。 主机包括用于获取移动机构的位移的位移获取单元和用于计算测量值的测量值计算单元。 测量值计算单元包括：校正量计算单元，用于计算用于校正测量件的位置误差的校正量;以及校正单元，用于基于移动机构的位移校正测量片的位置误差和校正 量。 校正量计算单元计算用于校正探头的基准点处的探针的平移误差的平移校正量和用于根据探头周围的旋转角校正探针的旋转误差的旋转校正量 参考点和探针从参考点到测量片的长度。

公开(公告)号：US07319909B2

公开(公告)日：2008-01-15

申请号：US11333409

申请日：2006-01-17

申请人： Nobuhiro Ishikawa

发明人： Nobuhiro Ishikawa

IPC分类号： G05B13/02 ,  G05B11/01

CPC分类号： G05B19/19 ,  G05B2219/42062 ,  G05B2219/42091

摘要： In a quadruple loop position control device (1) including: a drive controller (5) having a current control loop that controls motor current (I) and a motor speed control loop that controls a motor speed (Vm); a speed control loop (3) that controls a speed (Vd) of a driven body (2); and a position control loop (4) that controls a position (Pd) of the driven body (2), an adder (6) that adds an output value from the position control loop (4) and an output value from the speed control loop (3) and inputs an addition result to the motor speed control loop is provided. By providing the adder (6), the position control device (1) functions as a control device of a first-order system, so that occurrence of an overshoot may securely be avoided even when respective transfer functions of the position control device (1) are set for purpose of suppressing a vibrating behavior of the driven body (2).

摘要翻译： 在四环路位置控制装置（1）中，包括：具有控制电动机电流（I）的电流控制回路和控制电动机速度（Vm）的电动机速度控制回路的驱动控制器（5）; 控制从动体（2）的速度（Vd）的速度控制回路（3）; 以及控制所述驱动体（2）的位置（Pd）的位置控制回路（4），将来自所述位置控制回路（4）的输出值与来自所述速度控制回路（4）的输出值相加的加法器（6） （3），并向电动机速度控制回路输入加法结果。 通过提供加法器（6），位置控制装置（1）用作一级系统的控制装置，使得即使位置控制装置（1）的各个传递功能，也可以确保避免发生过冲， 被设定为用于抑制被驱动体（2）的振动特性。

公开(公告)号：US20070271803A1

公开(公告)日：2007-11-29

申请号：US11802856

申请日：2007-05-25

申请人： Nobuhiro Ishikawa

发明人： Nobuhiro Ishikawa

IPC分类号： G01B5/004

CPC分类号： G01B21/045 ,  G01B5/008 ,  G01B5/28

摘要： An arithmetic unit 212 is a correction filter 212a based on the relative displacement characteristics between a scale unit 19b and the end of a slider 16, and calculates a measured value by adding up together the displacement of the stylus tip 17a and a value found by applying the correction filter 212a to the displacement of the slider 16 detected by the scale unit 19b.

摘要翻译： 算术单元212是基于比例单元19b和滑块16的端部之间的相对位移特性的校正滤波器212a，并且通过将触针尖端1a的位移和值相加在一起来计算测量值 通过将校正滤光器212a应用于由刻度单元19b检测到的滑块16的位移而发现。