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公开(公告)号：US20120204420A1
公开(公告)日：2012-08-16
申请号：US13371947
申请日：2012-02-13
IPC分类号： H05K3/10
CPC分类号： G03F7/2014 , H05K1/0296 , H05K3/0097 , H05K3/108 , H05K3/4644 , H05K2201/093 , Y10T29/49155
摘要： A method for manufacturing a wiring board, which prevents electrostatic destruction generated in a mask pattern, by employing a structured exposure mask at a low cost is provided. The method can comprise the steps of forming a photosensitive resin layer on an insulating layer located underneath a predetermined conductor layer, forming a plating resist by exposing and developing the photosensitive resin layer with an exposure light while an exposure mask is disposed on a surface of the photosensitive resin layer, forming a metal plating layer that has a conductor pattern formed by applying a metal plating to an opening of the plating resist, and removing the plating resist. The exposure mask may have a plurality of graphic patterns, and each corner of the graphic patterns maybe chamfered by 50 micrometers or more so that electrostatic destruction due to electric discharge between the adjacent graphic patterns is prevented.
摘要翻译： 提供一种通过以低成本采用结构化的曝光掩模来制造布线板的制造方法，其防止在掩模图案中产生的静电破坏。 该方法可以包括以下步骤：在位于预定导体层下方的绝缘层上形成感光性树脂层，通过曝光光曝光和显影感光性树脂层而形成电镀抗蚀剂，同时将曝光掩模设置在 形成具有通过对电镀抗蚀剂的开口施加金属电镀而形成的导体图案的金属镀层，以及去除电镀抗蚀剂。 曝光掩模可以具有多个图形，并且图形的每个角可以倒角50微米以上，从而防止由于相邻图形之间的放电引起的静电破坏。
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公开(公告)号：US08229694B2
公开(公告)日：2012-07-24
申请号：US12651082
申请日：2009-12-31
IPC分类号： G01C17/38
CPC分类号： G01B21/045
摘要： A coordinate measuring machine includes: a probe that has a contact point capable of movement within a predetermined range; a movement mechanism for moving the probe; and a controller for controlling the movement mechanism. The controller has a measurement value calculating unit for calculating a position of the contact point based on a displacement of the movement mechanism and a displacement of the probe. The measurement value calculating unit includes: a correction parameter calculator for calculating a correction parameter for correcting the displacement of the probe based on a measurement condition in measuring an object; a corrector for correcting the displacement of the probe based on the correction parameter; and a displacement synthesizing unit that synthesizes the displacement of the movement mechanism and the displacement of the probe corrected by the corrector to calculate the position of the contact point.
摘要翻译： 坐标测量机包括：具有能够在预定范围内移动的接触点的探头; 用于移动探针的移动机构; 以及用于控制移动机构的控制器。 控制器具有测量值计算单元，用于基于移动机构的位移和探头的位移来计算接触点的位置。 测量值计算单元包括：校正参数计算器，用于基于测量对象中的测量条件来计算用于校正探针的位移的校正参数; 校正器，用于基于校正参数校正探针的位移; 以及位移合成单元，其合成所述移动机构的位移和由所述校正器校正的所述探头的位移，以计算所述接触点的位置。
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公开(公告)号：US20080065341A1
公开(公告)日：2008-03-13
申请号：US11896903
申请日：2007-09-06
申请人： Nobuhiro Ishikawa , Shingo Kiyotani
发明人： Nobuhiro Ishikawa , Shingo Kiyotani
CPC分类号： G01B21/045
摘要： A surface-profile measuring instrument includes a movement-estimating unit (600) that estimates an movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit (220) to calculate an estimated movement state quantity, and a correction calculating unit (700) that corrects a detection value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement estimating unit (600).The movement-estimating unit (600) has a nominal model setting unit (311) in which a nominal model as a frequency transfer characteristics from the scanning vector commanding unit to the probe of the scanning probe is set. The correction-calculating unit (700) includes a correction-amount calculating unit (720) that calculates a correction amount for correcting a measurement error generated by a deformation of the drive mechanism in accordance with the movement thereof and a measurement data synthesizing unit (430) that synthesizes the detection value of the drive sensor and the displacement sensor and the calculated correction-amount calculated by the correction-amount calculating unit (720).
摘要翻译： 表面轮廓测量仪器包括：运动估计单元，其根据由扫描矢量指令单元（220）发出的扫描矢量指令来估计驱动机构的运动状态，以计算估计运动状态量;以及 校正计算单元，其根据由所述移动估计单元计算出的估计移动状态量来校正驱动传感器的检测值。 运动估计单元（600）具有标称模型设定单元（311），其中设置了作为扫描矢量指令单元的扫描探针的探头的频率传递特性的标称模型。 校正计算单元（700）包括校正量计算单元（720），该校正量计算单元计算用于校正由驱动机构的变形产生的测量误差的校正量，以及测量数据合成单元（430） ），其合成驱动传感器和位移传感器的检测值以及由校正量计算单元计算的计算出的校正量（720）。
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公开(公告)号：US06937070B2
公开(公告)日：2005-08-30
申请号：US09912184
申请日：2001-07-24
CPC分类号： G01B7/003 , G01R19/04 , H03D1/2245
摘要： Two all pass filters (11, 12) with 90° phase-shifted different center frequencies are employed to pass an alternating signal S with jitters in the period to generate signals S1 and S2, 90° phase-shifted from each other. A pulse generator (22) generates a sampling pulse Sp by detecting a zero cross point of the phase-shifted signal S2. A full-wave rectifier (21) rectifies full waves of the phase-shifted signal S1 and provides a rectified output to a sampling circuit (23), which extracts a peak value of the amplitude at the timing of the sampling pulse Sp.
摘要翻译： 采用具有90°相移的不同中心频率的两个全通滤波器（11,12）在该周期内通过具有抖动的交替信号S以产生彼此相移的信号S 1和S 2，90°相移。 脉冲发生器（22）通过检测相移信号S 2的零交叉点来产生采样脉冲Sp。 全波整流器（21）对相移信号S 1的全波进行整流，并向采样电路（23）提供整流输出，该采样电路（23）在采样脉冲Sp的定时提取振幅的峰值。
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公开(公告)号：US6044569A
公开(公告)日：2000-04-04
申请号：US21543
申请日：1998-02-10
IPC分类号： G01B21/04 , G05B19/401 , G01B21/20 , G01B5/00
CPC分类号： G05B19/401 , G01B21/045
摘要： In a measuring method with a probe (a touch trigger probe 70), a velocity V1 and a coordinate value P1 of the prove trigger probe 70 are detected when a contact-detection signal is generated from the probe 70, and then a coordinate value P0 at the moment of contact is found from the coordinate value P1, the velocity V1, and an elapsed time T1 of the touch trigger prove 70 since the contact detection (an elapsed time from the contact until the contact-detection signal is generated).
摘要翻译： 在具有探针（触摸式触发器70）的测量方法中，当从探头70产生接触检测信号时，检测出证明触发探针70的速度V1和坐标值P1，然后将坐标值P0 从接触检测（从接触到接触检测信号生成之间的经过时间），从坐标值P1，速度V1和触摸触发的经过时间T1发现接触时刻。
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公开(公告)号：US5922964A
公开(公告)日：1999-07-13
申请号：US881412
申请日：1997-06-24
摘要： The phase controlling circuit 1 controls the phase of the input sinusoidal signal S1 to generate first and second sinusoidal signal S1 and S2 which have different phases of 90.degree. shifted from each other. The signal generating circuits 2a and 2b square the first and second sinusoidal signal S1 and S2 to generate first and second squared sinusoidal signals S1.sup.2 and S2.sup.2, respectively. The squared sinusoidal signals S1.sup.2 and S2.sup.2 are added by the signal adding circuit 3, thereby generating the added output S3 which is an amplitude of the input sinusoidal signal S. The phase controlling circuit 1 comprises 90.degree. phase shift circuits 11 and 12 which have a common signal input terminal and the respective signal output terminals. The 90.degree. phase shift circuit is composed of an all-pass filter whose central frequency is set to be f0-.DELTA. f so as to generate the first sinusoidal signal. The second 90.degree. phase shift circuit is composed of an all-pass filter whose central frequency is set to be f0+.DELTA. f so as to generate the second sinusoidal signal.
摘要翻译： 相位控制电路1控制输入正弦信号S1的相位，以产生彼此相差90°的不同相位的第一和第二正弦信号S1和S2。 信号发生电路2a和2b使第一和第二正弦信号S1和S2平方以分别产生第一和第二平方正弦信号S12和S22。 平方正弦信号S12和S22由信号相加电路3相加，从而产生作为输入正弦信号S的振幅的相加输出S3.相位控制电路1包括90°相移电路11和12，它们具有 公共信号输入端子和相应的信号输出端子。 90°相移电路由全通滤波器组成，其中心频率设定为f0-DELTA f，以产生第一正弦信号。 第二个90°相移电路由一个全通滤波器组成，其中心频率被设置为f0 + DELTA f，以产生第二个正弦信号。
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公开(公告)号：US08134325B2
公开(公告)日：2012-03-13
申请号：US12453611
申请日：2009-05-15
IPC分类号： G05D3/12
CPC分类号： G05B19/416 , G05B2219/41021 , G05B2219/41427
摘要： The controller includes a position commander and an error corrector. The position commander outputs a position command value for moving a moving mechanism. The error corrector includes a feedforward controller and a compensator calculator. The feedforward controller performs a feedforward control of the moving mechanism based on the position command value outputted from the position commander and includes a compensator. The compensator calculator calculates a value to be set as the compensator of the feedforward controller based on the position command value outputted from the position commander.
摘要翻译： 控制器包括位置指令器和纠错器。 位置指令器输出用于移动移动机构的位置指令值。 误差校正器包括前馈控制器和补偿器计算器。 前馈控制器基于从位置指令器输出的位置指令值执行移动机构的前馈控制，并且包括补偿器。 补偿器计算器基于从位置指令器输出的位置指令值计算要设置为前馈控制器的补偿器的值。
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公开(公告)号：US20090302797A1
公开(公告)日：2009-12-10
申请号：US12453611
申请日：2009-05-15
IPC分类号： G05B19/404
CPC分类号： G05B19/416 , G05B2219/41021 , G05B2219/41427
摘要： The controller includes a position commander and an error corrector. The position commander outputs a position command value for moving a moving mechanism. The error corrector includes a feedforward controller and a compensator calculator. The feedforward controller performs a feedforward control of the moving mechanism based on the position command value outputted from the position commander and includes a compensator. The compensator calculator calculates a value to be set as the compensator of the feedforward controller based on the position command value outputted from the position commander.
摘要翻译： 控制器包括位置指令器和纠错器。 位置指令器输出用于移动移动机构的位置指令值。 误差校正器包括前馈控制器和补偿器计算器。 前馈控制器基于从位置指令器输出的位置指令值执行移动机构的前馈控制，并且包括补偿器。 补偿器计算器基于从位置指令器输出的位置指令值计算要设置为前馈控制器的补偿器的值。
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公开(公告)号：US20090287444A1
公开(公告)日：2009-11-19
申请号：US12453245
申请日：2009-05-04
申请人： Nobuhiro Ishikawa
发明人： Nobuhiro Ishikawa
IPC分类号： G01B5/008
CPC分类号： G01B21/045
摘要： A coordinate measuring machine includes: a probe provided with a measurement piece; a moving mechanism that effects a scanning movement of the probe; and a host computer for controlling the moving mechanism. The host computer includes a displacement acquiring unit for acquiring a displacement of the moving mechanism and a measurement value calculating unit for calculating a measurement value. The measurement value calculating unit includes a correction-amount calculating unit for calculating a correction amount for correcting a position error of the measurement piece and a correcting unit for correcting the position error of the measurement piece based on the displacement of the moving mechanism and the correction amount. The correction-amount calculating unit calculates a translation-correction amount for correcting a translation error of the probe at a reference point on the probe and a rotation-correction amount for correcting a rotation error of the probe according to a rotation angle of the probe around the reference point and a length of the probe from the reference point to the measurement piece.
摘要翻译： 坐标测量机包括：具有测量件的探头; 移动机构，其实现探针的扫描运动; 以及用于控制移动机构的主计算机。 主机包括用于获取移动机构的位移的位移获取单元和用于计算测量值的测量值计算单元。 测量值计算单元包括：校正量计算单元，用于计算用于校正测量件的位置误差的校正量;以及校正单元，用于基于移动机构的位移校正测量片的位置误差和校正 量。 校正量计算单元计算用于校正探头的基准点处的探针的平移误差的平移校正量和用于根据探头周围的旋转角校正探针的旋转误差的旋转校正量 参考点和探针从参考点到测量片的长度。
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公开(公告)号：US07471056B2
公开(公告)日：2008-12-30
申请号：US11291452
申请日：2005-12-01
申请人： Shingo Kiyotani , Nobuhiro Ishikawa
发明人： Shingo Kiyotani , Nobuhiro Ishikawa
IPC分类号： G05D23/275
CPC分类号： G05B19/19 , G05B2219/42104
摘要： A control device includes a first switch (400) by which an input signal to a motor speed control loop (910) is selected from a signal of a position control loop (300) and a signal of the speed control loop (200), and a switch controller (500) that controls switching of the first switch (400), so that the first switch (400) can switch between a quadruple loop (a current control loop, the motor speed control loop, the speed control loop (200) and the position control loop (300)) with the speed control loop (200) embedded therein, and a triple loop (the current control loop, the motor speed control loop and the position control loop (300)) without the speed control loop (200), corresponding to a transient state and a steady state.
摘要翻译： 控制装置包括第一开关（400），通过该第一开关从位置控制回路（300）的信号和速度控制回路（200）的信号中选择到电动机速度控制回路（910）的输入信号，以及 开关控制器（500），其控制所述第一开关（400）的切换，使得所述第一开关（400）可以在四极环（电流控制回路，所述电动机速度控制回路，所述速度控制回路） 和位置控制回路（300））以及三速回路（电流控制回路，电动机速度控制回路和位置控制回路（300）），没有速度控制回路（300） 200），对应于瞬态和稳态。
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