摘要:
A regenerative refrigerating apparatus which can increase the speed of cooling and heating a subject to be cooled. The specific constitution of the regenerating type refrigerating apparatus includes a pressure control means 4 having a compressor 4a, a high pressure selector valve 4b, and a low pressure selector valve 4c, an expanding/compressing unit 1 having a room temperature end 1a and a low temperature end 1b, and a regenerating unit 2 having a room temperature end 2a and a low temperature end 2b, carries out heat transfer to a subject to be cooled, and is comprised of a flow path for working gas connecting the low temperature end 1b of the expanding/compressing unit and the low temperature end 2b of the regenerating unit with each other, and simultaneously extending to the subject to be cooled 7. Consequently, it is possible to significantly increase the utilization ratio of the refrigerating apparatus, and to widely apply the refrigerating apparatus to sensors and semiconductor manufacturing apparatuses.
摘要:
A pulse tube refrigerator which enables holding a cooling temperature without the use of a heater and the like. The pulse tube refrigerator employs a working gas which has a liquefying temperature within the range of an operating temperature of the pulse tube refrigerator.