公开(公告)号：US20110048963A1

公开(公告)日：2011-03-03

申请号：US12863410

申请日：2009-01-07

申请人： Shinji Shimizu ,  Sachiko Nakajima ,  Hiroyuki Okumura ,  Satoshi Maruyama ,  Takashi Oga

发明人： Shinji Shimizu ,  Sachiko Nakajima ,  Hiroyuki Okumura ,  Satoshi Maruyama ,  Takashi Oga

IPC分类号： C25F3/16 ,  B32B37/00 ,  B32B3/10 ,  C25F7/00

CPC分类号： B24B37/26 ,  B24B37/046 ,  B24B37/22 ,  B24D18/00 ,  Y10T156/1057

摘要： The present invention aim to provide a method of manufacturing an electropolishing pad, which is excellent in planarity, can reduce occurrence of scratches, and has a high polishing rate. The present invention relates to a method of manufacturing an electropolishing pad, including the steps of: laminating a tin sheet on and along a recessed structure surface of a resin layer to produce a laminated sheet having grooves in a tin sheet surface; and forming through holes penetrating the tin sheet and the resin layer in the laminated sheet.

摘要翻译： 本发明的目的在于提供一种制造电抛光垫的方法，其平面性优异，可以减少划痕的发生，并且具有高抛光速度。 电抛光垫的制造方法技术领域本发明涉及一种电抛光垫的制造方法，其特征在于，包括以下步骤：将锡片层叠在树脂层的凹部结构面上并沿着树脂层的凹部结构表面层叠，制作在锡片表面上具有槽的层压片; 并且形成穿过层叠片中的锡片和树脂层的通孔。