公开(公告)号：US20030001118A1

公开(公告)日：2003-01-02

申请号：US10225141

申请日：2002-08-22

申请人： Shinko Electric Co., Ltd.

发明人： Masanao Murata

IPC分类号： G01N021/86 ,  G01V008/00

CPC分类号： H01L21/67259

摘要： This invention has as an object thereof to provide an overhead-traveling carrying apparatus which is capable of inexpensively incorporating countermeasures for detecting the presence of an obstacle such as a human being or a carelessly placed object during the lowering of an object to be carried onto the load port of a semiconductor manufacturing device prior to the contact of the obstacle with the object to be carried, thereby avoiding such contact. A structure is adopted in which obstacle detecting sensors which scan the raising and lowering path between a carriage and the load port of each semiconductor manufacturing apparatus, and which detect the presence of obstacles, are provided on the carriage with attached hoist.

摘要翻译： 本发明的目的在于提供一种架空行进式运载装置，其能够廉价地结合对象物，以便在将待运送物体降低到对象物上时，检测出诸如人或障碍物等障碍物的存在 在障碍物与待携带物体接触之前，半导体制造装置的负载端口，从而避免这种接触。 采用这样的结构，其中，在具有附带的起重机的滑架上设置有扫描每个半导体制造装置的托架和负载端口之间的升降路径并且检测障碍物的存在的障碍物检测传感器。