公开(公告)号：US20040232361A1

公开(公告)日：2004-11-25

申请号：US10843762

申请日：2004-05-12

发明人： Ming Cai

IPC分类号： G01N021/86 ,  G01V008/00

CPC分类号： H04N1/4076

摘要： A scanner and calibration method use therein. Setting first exposure duration and a second exposure duration for a transparency, wherein the first exposure duration is proportional to the second exposure duration. Scanning the transparency and a calibration area to produce a scan signal and a calibration signal, respectively, wherein the exposure duration for scanning the transparency is referred to as the first exposure duration, and the exposure duration for scanning the calibration area is referred to as the second exposure duration. Calculating a first gain coefficient according to the calibration signal. Calculating a second gain coefficient according to the first gain coefficient and a specific ratio of the first exposure duration to the second exposure duration, and finally, amplifying the scan signal by the second gain coefficient.

摘要翻译： 其中使用扫描仪和校准方法。 设置透明度的第一曝光持续时间和第二曝光持续时间，其中第一曝光持续时间与第二曝光持续时间成比例。 扫描透明度和校准区域分别产生扫描信号和校准信号，其中用于扫描透明度的曝光持续时间被称为第一曝光持续时间，并且用于扫描校准区域的曝光持续时间被称为 第二次曝光时间。 根据校准信号计算第一增益系数。 根据第一增益系数和第一曝光持续时间与第二曝光持续时间的特定比例计算第二增益系数，最后，通过第二增益系数放大扫描信号。

公开(公告)号：US20040195530A1

公开(公告)日：2004-10-07

申请号：US10723618

申请日：2003-11-25

发明人： Changsoo Kwak ,  Eul Gyoon Lim ,  Dae Yong Kim

IPC分类号： G01V008/00 ,  G01N021/86

CPC分类号： G03F9/703 ,  G01B11/14 ,  G03F9/7038

摘要： An apparatus for measuring a gap between a mask and a substrate and a method thereof are provided. The apparatus includes a laser displacement sensor, which is placed on a mask and a substrate spaced apart from each other by a predetermined gap, emits laser beams while moving onto the mask and the substrate in a horizontal direction and measures a gap between the mask and the substrate using a variation in distance values measured based on light-receiving positions of the laser beams that are reflected from the mask and the substrate and return to their original positions, respectively.

摘要翻译： 提供了一种用于测量掩模和基板之间的间隙的装置及其方法。 该装置包括放置在掩模上的激光位移传感器和彼此间隔开预定间隙的基板，同时在水平方向上移动到掩模和基板上时发射激光束并测量掩模和 基板使用基于从掩模和基板反射的激光束的光接收位置测量的距离值的变化，并分别返回到其原始位置。

公开(公告)号：US20040188641A1

公开(公告)日：2004-09-30

申请号：US10692047

申请日：2003-10-23

发明人： Ulysses Gilchrist ,  Louise S. Barriss ,  Hagen Raue ,  Berndt Lahne ,  Manfred Heinze ,  Joachim Konig ,  Klaus Schultz

IPC分类号： G01V008/00 ,  G01N021/86

CPC分类号： H01L21/67265 ,  H01L21/67259 ,  H01L21/681 ,  Y10S414/137

摘要： For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation. A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4). The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.

摘要翻译： 对于用于检测堆叠在壁元件的开口处的基板的装置，存在构造检测装置的问题，使得能够相对于基板的过程更灵活地执行基板的位置的检测 测量和使用的测量方法以及传感器系统对待检测的半导体衬底的限定方法被确保在具有降低的颗粒产生风险的测量的确定位置。 发送和接收装置（11）由安装在壁元件（1）上的垂直驱动机构（10）和传感器头（13）组成，该传感器头可通过垂直驱动机构在下位和上位之间进行调节 （10），所述传感器头被布置成在垂直驱动机构（10）上枢转，以便枢转到所述开口（4）中。 该装置特别适用于半导体工业，用于记录具有诸如半导体晶片，平板显示器或掩模的基板的盒或容器的占有状态。

公开(公告)号：US20040155196A1

公开(公告)日：2004-08-12

申请号：US10365339

申请日：2003-02-12

发明人： Pekka M. Typpo

IPC分类号： G01N021/86

CPC分类号： G01N23/16

摘要： A material sheet attribute detection system, the material sheet having a first side and a second side, the system includes a radiation source located proximate to the first side of the material sheet, the radiation source emitting radiation toward the material sheet, a radiation detection array located proximate to the second side of the material sheet, the radiation detection array producing at least one signal based on the radiation detected from the radiation source and a processor utilizing the at least one signal to determine a position of the material sheet.

摘要翻译： 一种材料片属性检测系统，该材料片具有第一侧和第二侧，该系统包括位于材料片的第一侧附近的辐射源，辐射源朝向材料片发射辐射，辐射检测阵列 位于材料片的第二侧附近的放射线检测阵列基于从辐射源检测的辐射产生至少一个信号，以及处理器，利用该至少一个信号来确定材料片的位置。

公开(公告)号：US20040149939A1

公开(公告)日：2004-08-05

申请号：US10479464

申请日：2004-03-29

发明人： Adam Matthew Dickson ,  Casper Murtonen ,  Jonathan Spring ,  Austin Phillips ,  Terrance Robb

IPC分类号： G01V008/00 ,  G01N021/86

CPC分类号： G08G1/04 ,  G01P3/68

摘要： A monitoring system includes a transmitter (102) with two transmit modules (208, 210) and a receiver (104) with two receive modules (212, 214). Each of the transmit modules (208, 210) generates an optical signal modulated at a unique frequency. The optical signals are transmitted across a roadway (112) and are detected by the receive modules (212, 214). When a vehicle (110) moves between the transmitter (102) and receiver (104), the optical signals are blocked. The receiver (104) generates timestamped make and break events corresponding to the blocking and unblocking of the signals, and these are used to determine parameters for the vehicle (110) such as velocity and vehicle classification. Because each signal is modulated at a different frequency, each receive module (212, 214) can distinguish the signals received from each of the transmit modules (208, 210), allowing the lane position of the vehicle (110) in a multi-lane roadway (112) to be determined.

摘要翻译： 监测系统包括具有两个发射模块（208,210）的发射机（102）和具有两个接收模块（212,214）的接收机（104）。 每个发射模块（208,210）产生以唯一频率调制的光信号。 光信号跨越道路（112）传输并由接收模块（212,214）检测。 当车辆（110）在发射机（102）和接收机（104）之间移动时，光信号被阻塞。 接收机（104）生成对应于信号的阻塞和解除阻塞的时间戳制造和断开事件，并且这些用于确定车辆（110）的参数，例如速度和车辆分类。 因为每个信号以不同的频率被调制，所以每个接收模块（212,214）可以区分从每个发射模块（208,210）接收的信号，从而允许车辆（110）在多通道中的车道位置 道路（112）待确定。

公开(公告)号：US20040135106A1

公开(公告)日：2004-07-15

申请号：US10342786

申请日：2003-01-15

发明人： John Philip Bolash ,  Mahesan Chelvayohan ,  Patrick Laurence Kroger

IPC分类号： G01V008/00 ,  G01N021/86

CPC分类号： G03G15/6529 ,  G01V8/12 ,  G03G2215/00616 ,  G03G2215/00751

摘要： A media type sensing method for an imaging apparatus includes the steps of changing a light intensity of a light source by changing a drive signal, while monitoring for an output change of a comparator; determining a drive signal value of the drive signal at a point of detection of the output change; and correlating the drive signal value to a specific media type.

摘要翻译： 用于成像装置的介质类型感测方法包括以下步骤：在监视比较器的输出变化的同时通过改变驱动信号来改变光源的光强度; 在所述输出变化的检测点处确定所述驱动信号的驱动信号值; 并将驱动信号值与特定介质类型相关联。

公开(公告)号：US20040099824A1

公开(公告)日：2004-05-27

申请号：US10301841

申请日：2002-11-22

申请人： TDK CORPORATION

发明人： Hiroshi Igarashi ,  Tsutomu Okabe ,  Toshihiko Miyajima

IPC分类号： G01V008/00 ,  G01N021/86

CPC分类号： H01L21/67265 ,  G01V8/12 ,  H01L21/67772 ,  Y10S414/137

摘要： A wafer processing apparatus on which a pod having an opening is detachably mounted is provided with a door unit and a mapping unit provided with a transmitting type sensor having an emitter and a detector forming a slot therebetween. The emitter and the detector are moved toward the opening in the pod and are plunged into the interior of the pod after a door is opened by the door unit, and the slot between the emitter and the detector crosses an end portion of a wafer to thereby detect the presence or absence of the wafer. Thereby, a mechanism portion liable to produce dust which may adhere to the wafer and cause the contamination thereof can be disposed separately from the pod.

摘要翻译： 具有可拆卸地安装有开口的容器的晶片处理装置设置有门单元和映射单元，该单元设置有具有发射器的传输型传感器和在其间形成狭槽的检测器。 发射器和检测器朝向容器中的开口移动，并且在门被门单元打开之后被插入到容器的内部，并且发射器和检测器之间的槽与晶片的端部相交，由此 检测晶片的存在或不存在。 因此，可以与容器分开设置容易产生可能附着在晶片上并导致其污染的灰尘的机构部分。

公开(公告)号：US20040099823A1

公开(公告)日：2004-05-27

申请号：US10399815

申请日：2003-11-21

发明人： Gerhard Abraham ,  Wolfgang Krob ,  Robert Vonasek

IPC分类号： G01N021/86

CPC分类号： G01B11/0616 ,  G01B11/06

摘要： The invention relates to a device for inspecting and testing a single glass pane, an insulating glass element (41, 42, 43), which comprises two or more parallel glass panes, or a laminated glass (70, 71, 72). The inventive device comprises a first light source (2) whose optical axis can be brought into a reflection position with the test object and comprises an optical unit for determining the distance between the reflected parallel light beams (11, 12, 13, 14, 15, 16). Said optical unit is formed by a local resolution opto-electronic detector (3) that is connected to an evaluation device (45). Said evaluation device determines, from the distances between and the intensities of the reflected light beams (11, 12, 13, 14, 15, 16), the thickness of the single glass pane, the thickness of the individual glass panes of the insulating glass element (41, 42, 43) or the thickness of the layers of the laminated glass (70, 71, 72) and the distances therebetween and/or the presence and the location of coatings (50), which are applied to the single glass pane or to the individual glass panes of the insulating element (41, 42, 43), or of one or more laminated films (71) contained in the laminated glass (70, 71, 72).

摘要翻译： 本发明涉及一种用于检查和测试单个玻璃板的装置，包括两个或多个平行玻璃板或夹层玻璃（70,71,72）的绝缘玻璃元件（41,42,43）。 本发明的装置包括第一光源（2），其第一光源（2）的光轴可以与测试对象成反射位置，并且包括用于确定反射的平行光束（11,12,13,14,15）之间的距离的光学单元 ，16）。 所述光学单元由连接到评估装置（45）的局部分辨率光电检测器（3）形成。 所述评估装置根据反射光束（11,12,13,14,15,16）的强度和单个玻璃板的厚度，绝缘玻璃的单个玻璃板的厚度， 元件（41,42,43）或层压玻璃（70,71,72）的层的厚度及其间的距离和/或涂层（50）的存在和位置，其施加到单个玻璃 玻璃板或绝缘元件（41,42,43）的单个玻璃板，或者夹在夹层玻璃（70,71,72）中的一个或多个层叠膜（71）。

公开(公告)号：US20040079871A1

公开(公告)日：2004-04-29

申请号：US10633595

申请日：2003-08-05

申请人： OMRON CORPORATION

发明人： Takahiro Oikawa ,  Tadashi Senga

IPC分类号： H01J005/16 ,  G06M007/00 ,  G01N021/86

CPC分类号： G01V8/12

摘要： A photoelectric sensor includes: a light projecting section projecting detection medium light to a detection object region; and a light receiving section receiving reflecting light or transmitted light from the detection object region, the sections being in a single piece or in separate pieces. The light projecting section includes: a light source generating the detection medium light; and a light projecting lens for collimating or collecting the detection medium light from the light source to form a beam spot or a light collecting point in the detection object region. The light projecting section further includes: a deflection angle adjusting unit capable of finely adjusting an optical axis deflection angle of the detection medium light projected to the detection object region from the light projecting section.

摘要翻译： 光电传感器包括：将检测介质光投射到检测对象区域的光投射部; 以及光接收部，其从所述检测对象区域接收反射光或透射光，所述部分为单片或分开片。 光投射部包括：产生检测介质光的光源; 以及投光透镜，用于对来自光源的检测介质光进行准直或收集，以在检测对象区域中形成光斑或聚光点。 光投射部还包括：偏转角调节单元，其能够从光投射部微调调整到检测对象区域的检测介质光的光轴偏转角。

公开(公告)号：US20040051059A1

公开(公告)日：2004-03-18

申请号：US10245526

申请日：2002-09-17

申请人： Kimberly-Clark Worldwide, Inc.

发明人： Tanakon Ungpiyakul ,  Thomas A. Bett

IPC分类号： G01N021/86

CPC分类号： A61F13/15772 ,  B65H23/1882 ,  B65H2511/11 ,  B65H2511/22 ,  B65H2511/512 ,  B65H2513/104 ,  B65H2801/57 ,  B65H2220/02 ,  B65H2220/01

摘要： The present invention provides a method and apparatus (20) for controlling a registration between a target point (22) on a moving web (24), and a production outcome provided by a production operation. A method aspect can include a transporting of the web (24) along a movement direction (26) past a reference detector (30), and a detecting of at least a first reference point (50) on the web (24). The target point (22) can be designated by employing at least the first reference point (50). The web is transported past a speed-sensor (32), and the speed-sensor can measure a web speed of the moving web (24) to provide an output of web speed data. The web speed data is integrated over time to determine a web-length which has been transported past the speed-sensor (32). The production outcome is actuated at a production-device (34), and the actuating of the production outcome can be adjusted to occur after a reference-length of the web (24) has been transported past the speed-sensor (32).

摘要翻译： 本发明提供了一种用于控制移动幅材（24）上的目标点（22）与由生产操作提供的生产结果之间的配准的方法和装置（20）。 方法方面可以包括沿着运动方向（26）通过参考检测器（30）传送卷筒纸（24），以及检测纸幅（24）上的至少第一参考点（50）。 可以通过至少使用第一参考点（50）来指定目标点（22）。 纸幅被传送通过速度传感器（32），并且速度传感器可以测量移动幅材（24）的纸幅速度以提供纸幅速度数据的输出。 纸幅速度数据随时间被集成，以确定已经传送通过速度传感器（32）的卷筒纸长度。 生产结果在生产装置（34）处被启动，并且可以在卷材（24）的参考长度已经传送通过速度传感器（32）之后调整生产结果的致动。