公开(公告)号：US4695963A

公开(公告)日：1987-09-22

申请号：US721804

申请日：1985-04-10

申请人： Shinobu Sagisawa ,  Teizo Takahama ,  Mitsuo Kobayashi

发明人： Shinobu Sagisawa ,  Teizo Takahama ,  Mitsuo Kobayashi

IPC分类号： G01L5/00 ,  B25J13/08 ,  B25J19/02 ,  G01L1/18 ,  G01L5/16 ,  G01L5/22 ,  G05B19/42 ,  G01L1/16

CPC分类号： B25J13/081 ,  G01L1/18 ,  G01L5/162 ,  G01L5/228

摘要： A pressure sense recognition control system having at least one pressure sensor module for detecting the two-dimensional distribution of the component forces in the three directions in the rectangular coordinate system of a force applied to the pressure receiving surface of the pressure sensor modules. The pressure sensor module has at least one pressure sensor cell having a pressure sensing member made of single crystal silicon, and a plurality of diffusion type strain gauges provided on the surfaces of the pressure sensing member which are substantially perpendicular to the pressure receiving surface and for detecting the three component forces applied to the pressure surfaces in response to the changes of an output of a bridge composed of the strain gauges. These members are mounted on an object, the drive of which is to be controlled. The detection signals derived from the pressure sensor module are processed and converted into pressure sense detection data corresponding to the pressure surfaces for each of the component forces. The data is further processed to produce pressure sense recognition data. Data for controlling the drive of the object is obtained from the pressure sense recognition data.

摘要翻译： 一种压力感测识别控制系统，其具有至少一个压力传感器模块，用于检测施加到压力传感器模块的压力接收表面的力的直角坐标系中的三个方向上的分力的二维分布。 所述压力传感器模块具有至少一个压力传感器单元，所述压力传感器单元具有由单晶硅制成的压力感测构件，以及多个扩散型应变计，其设置在所述压力感测构件的表面上，所述多个扩散型应变计基本上垂直于压力接收表面， 响应于由应变计构成的桥的输出的变化，检测施加到压力表面的三个分力。 这些构件安装在要被控制的驱动器上的物体上。 从压力传感器模块导出的检测信号被处理并转换成对应于每个分力的压力表面的压力检测数据。 进一步处理数据以产生压力感测识别数据。 从压力感测识别数据获得用于控制物体的驱动的数据。