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公开(公告)号:US4924131A
公开(公告)日:1990-05-08
申请号:US257346
申请日:1988-10-13
申请人: Shiro Nakayama , Satoshi Kunimura , Shigemi Takahashi , Katsuhiko Takahashi , Toshimitu Hirayama , Masao Akutsu
发明人: Shiro Nakayama , Satoshi Kunimura , Shigemi Takahashi , Katsuhiko Takahashi , Toshimitu Hirayama , Masao Akutsu
IPC分类号: G01P15/09 , H01L41/113 , H01L41/08
CPC分类号: H01L41/1132 , G01P15/0922 , Y10S310/80
摘要: A piezo-electric acceleration sensor, including: a piezo-electric polymer membrane element having an element through-hole; a diaphragm having a diaphragm through-hole and attached to the piezo-electric membrane element so that the diaphragm hole is concentric to the element through-hole to form a laminate with a laminate through-hole; and a fixing mechanism, having a sensing hole, for fixing the laminate in a stretched manner, and wherein: the laminate through-hole has about 2.25 to about 80% of the area of the sensing hole; and the diaphragm and the piezo-electric element meet the equation:(Eb.times.Tb.sup.3)/(Ep.times.Tp.sub.3).gtoreq.about 5wherein Eb, Tb, Ep and Tp are Young's modulus thickness of the diaphragm, Young's modulus, and thickness of the piezo-electric element, respectively, whereby acceleration, applied to the diaphragm, is detected based on a quantity of electricity generated due to strains in a piezo-electric element.
摘要翻译: 一种压电加速度传感器,包括:具有元件通孔的压电聚合物膜元件; 隔膜,其具有隔膜通孔并附接到压电膜元件,使得隔膜孔与元件通孔同心,以形成具有层压通孔的层压体; 以及固定机构,其具有用于以拉伸方式固定所述层叠体的感测孔,并且其中:所述层压体通孔具有所述感测孔的面积的约2.25至约80%; 并且隔膜和压电元件满足以下等式:(EbxTb3)/(EpxTp3)> / =约5其中Eb,Tb,Ep和Tp是隔膜的杨氏模量厚度,杨氏模量和压电元件的厚度, 电子元件,由此基于由压电元件中的应变产生的电量来检测施加到隔膜的加速度。