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公开(公告)号:US20070086719A1
公开(公告)日:2007-04-19
申请号:US11562766
申请日:2006-11-22
申请人: Shiro Takahashi , Hisanori Suzuki , Junjie Si , Myint Aye , Liping Zuo , Kenneth Kong , Atsushi Watabe
发明人: Shiro Takahashi , Hisanori Suzuki , Junjie Si , Myint Aye , Liping Zuo , Kenneth Kong , Atsushi Watabe
IPC分类号: G02B6/10
CPC分类号: G02B6/12011 , G02B6/12007 , G02B6/12026 , G02B6/13 , G02B6/29355
摘要: A functional optical device has cores which are trenches, different portions of the cores being formed from different core materials. The optical device can be formed by forming trenches 5, 7, 9 within a substrate (normally a substrate 1 covered by a cladding layer 3), covering at least part of at least one trench 7 with a cover 11, depositing a first cladding layer 13 of a first cladding material to fill the trenches 5, 9 which are not covered, removing the cover 11, depositing a second cladding layer 15 of a second cladding material to fill the trenches 7 which were previously covered, removing core material outside the trenches 5, 7, 9, and applying a cladding layer to cover the trenches.
摘要翻译: 功能光学器件具有作为沟槽的芯,芯的不同部分由不同的芯材料形成。 光学器件可以通过在衬底(通常由覆盖层3覆盖的衬底1)内形成沟槽5,7,9形成,用盖11覆盖至少一个沟槽7的至少一部分,沉积第一覆层 13的第一包层材料填充未被覆盖的沟槽5,9,移除盖11,沉积第二覆层材料的第二覆层15以填充先前被覆盖的沟槽7,在沟槽外部移除芯材料 5,7,9,并且施加包层以覆盖沟槽。
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公开(公告)号:US07194176B2
公开(公告)日:2007-03-20
申请号:US10516058
申请日:2002-05-29
申请人: Shiro Takahashi , Hisanori Suzuki , Junjie Si , Myint Myint Aye , Liping Zuo , Hsin Yuan Kenneth Kong , Atsushi Watabe
发明人: Shiro Takahashi , Hisanori Suzuki , Junjie Si , Myint Myint Aye , Liping Zuo , Hsin Yuan Kenneth Kong , Atsushi Watabe
CPC分类号: G02B6/12011 , G02B6/12007 , G02B6/12026 , G02B6/13 , G02B6/29355
摘要: A functional optical device has cores which are trenches, different portions of the cores being formed from different core materials. The optical device can be formed by forming trenches 5,7,9 within a substrate (normally a substrate 1 covered by a cladding layer 3), covering at least part of at least one trench 7 with a cover 11, depositing a first cladding material to fill the trenches 5,9 which are not covered, removing the cover 11, depositing a second cladding layer 15 of a second cladding material to fill the trenches 7 which were previously covered, removing core material outside the trenches 5,7,9 and applying a cladding layer to cover the trenches.
摘要翻译: 功能光学器件具有作为沟槽的芯,芯的不同部分由不同的芯材料形成。 光学器件可以通过在衬底(通常由覆盖层3覆盖的衬底1)内形成沟槽5,7,9形成,用覆盖物11覆盖至少一个沟槽7的至少一部分,沉积第一覆层材料 填充未被覆盖的沟槽5,9,去除盖11,沉积第二覆层材料的第二覆层15以填充预先覆盖的沟槽7,去除沟槽5,7,9外的芯材料,以及 施加包层以覆盖沟槽。
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公开(公告)号:US20050169580A1
公开(公告)日:2005-08-04
申请号:US10516058
申请日:2002-05-29
申请人: Shiro Takahashi , Hisanori Suzuki , Junjie Si , Myint Aye , Liping Zuo , Hsin Kong , Atsushi Watabe
发明人: Shiro Takahashi , Hisanori Suzuki , Junjie Si , Myint Aye , Liping Zuo , Hsin Kong , Atsushi Watabe
CPC分类号: G02B6/12011 , G02B6/12007 , G02B6/12026 , G02B6/13 , G02B6/29355
摘要: A functional optical device has cores which are trenches, different portions of the cores being formed from different core materials. The optical device can be formed by forming trenches 5,7,9 within a substrate (normally a substrate 1 covered by a cladding layer 3), covering at least part of at least one trench 7 with a cover 11, depositing a first cladding material to fill the trenches 5,9 which are not covered, removing the cover 11, depositing a second cladding layer 15 of a second cladding material to fill the trenches 7 which were previously covered, removing core material outside the trenches 5,7,9 and applying a cladding layer to cover the trenches.
摘要翻译: 功能光学器件具有作为沟槽的芯,芯的不同部分由不同的芯材料形成。 光学器件可以通过在衬底(通常由覆盖层3覆盖的衬底1)内形成沟槽5,7,9形成,用覆盖物11覆盖至少一个沟槽7的至少一部分,沉积第一覆层材料 填充未被覆盖的沟槽5,9,去除盖11,沉积第二覆层材料的第二覆层15以填充预先覆盖的沟槽7,去除沟槽5,7,9外的芯材料,以及 施加包层以覆盖沟槽。
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