公开(公告)号：US06875359B2

公开(公告)日：2005-04-05

申请号：US10305796

申请日：2002-11-27

申请人： Shu Ogawa ,  Yasuyuki Kobayakawa ,  Yoshiya Kitagawa ,  Makoto Kikukawa

发明人： Shu Ogawa ,  Yasuyuki Kobayakawa ,  Yoshiya Kitagawa ,  Makoto Kikukawa

IPC分类号： C02F1/44 ,  B01D61/00 ,  B01D61/14 ,  B01D61/58 ,  B01D63/06 ,  H01L21/027 ,  H01L21/306

CPC分类号： B01D61/142 ,  B01D63/063

摘要： A developer liquid regenerating system is provided with a storage tank storing a TAAH (such as TMAH)- and photoresist-containing developer waste liquid, first separating means with NF membrane, connected to the waste liquid storage tank through conduits, a storage tank connected to the first separating means through a conduit, and second separating means with NF membrane, connected to the storage tank through conduits. The developer liquid regenerating system is also connected to a developing apparatus through a conduit connected to the storage tank, and to a developer liquid control/supply apparatus through a conduit connected to the storage tank.

摘要翻译： 显影液再生系统设有储存有TAAH（例如TMAH）和含光致抗蚀剂的显影剂废液的储罐，具有NF膜的第一分离装置，通过导管连接到废液储罐，储罐连接到 通过管道的第一分离装置和具有NF膜的第二分离装置通过管道连接到储存罐。 显影剂液体再生系统还通过连接到储罐的导管连接到显影装置，并且通过连接到储罐的导管连接到显影剂液体控制/供给装置。