公开(公告)号：US06778315B2

公开(公告)日：2004-08-17

申请号：US10254318

申请日：2002-09-25

Applicant: Shuwen Guo ,  Ross Hoffman

Inventor： Shuwen Guo ,  Ross Hoffman

IPC: G02B2600

CPC classification number: G02B26/0833 ,  B41J2/465 ,  B81B1/006 ,  B81B2201/042 ,  G02B26/0866

Abstract: A micro mirror structure including a plurality of individually movable mirrors. Each mirror has a generally concave shape from a top perspective at a temperature of about 20 degrees Celsius and has a generally convex shape from a top perspective at a temperature of about 85 degrees Celsius. In one embodiment, the radius of curvature may be greater than about 500 mm at a temperature of about 20 degrees Celsius and may be less than about −600 mm at a temperature of about 85 degrees Celsius at a thickness of about 10 microns. In another embodiment, the invention is a micro mirror structure including a plurality of individually movable mirrors arranged in an array. Each mirror includes a substrate, a diffusion barrier layer located above the substrate, and a reflective layer located above the diffusion barrier layer. The diffusion barrier layer generally limits the diffusion of the top reflective layer through the diffusion barrier layer.

Abstract translation: 一种微镜结构，包括多个可单独移动的反射镜。 每个反射镜在大约20摄氏度的温度下具有从顶部透视图的大致凹入的形状，并且在约85摄氏度的温度下从顶部的角度具有大致凸形的形状。 在一个实施例中，在大约20摄氏度的温度下，曲率半径可以大于约500mm，并且在约85摄氏度的温度下可以在约10微米的厚度下小于约-600mm。 在另一个实施例中，本发明是一种微镜结构，其包括以阵列布置的多个单独可移动的反射镜。 每个反射镜包括衬底，位于衬底上方的扩散阻挡层和位于扩散阻挡层上方的反射层。 扩散阻挡层通常限制顶部反射层通过扩散阻挡层的扩散。