公开(公告)号：US20200378892A1

公开(公告)日：2020-12-03

申请号：US16885186

申请日：2020-05-27

Applicant: Si-Ware Systems

Inventor： Yasser M. Sabry ,  Alaa Fathy ,  Diaa Abdelmaguid Khalil ,  Tarik Bourouina ,  Bassam A. Saadany

IPC: G01N21/61 ,  G01N21/03 ,  G01N21/05

Abstract: Aspects relate to a miniaturized gas cell that may be implemented into an integrated device for gas analysis. The miniaturized gas cell may be a multi-pass gas cell or a hollow waveguide gas cell. In some aspects, the miniaturized gas cell may include a bottom surface and sidewalls formed in a substrate (e.g., a silicon substrate or silicon on insulator (SOI) substrate). The gas cell further includes at least one gas inlet and at least one gas outlet coupled for injection of a gas into and out of the gas cell, respectively. In addition, the gas cell further includes an optical input and an optical output, each optically coupled to direct light into and out of the gas cell, respectively. In addition, a capping layer may be bonded to the substrate to form a top surface of the gas cell.

公开(公告)号：US12228510B2

公开(公告)日：2025-02-18

申请号：US16885186

申请日：2020-05-27

Applicant: Si-Ware Systems

Inventor： Yasser M. Sabry ,  Alaa Fathy ,  Diaa Abdelmaguid Khalil ,  Tarik Bourouina ,  Bassam A. Saadany

IPC: G01N21/61 ,  G01N21/03 ,  G01N21/05

Abstract: Aspects relate to a miniaturized gas cell that may be implemented into an integrated device for gas analysis. The miniaturized gas cell may be a multi-pass gas cell or a hollow waveguide gas cell. In some aspects, the miniaturized gas cell may include a bottom surface and sidewalls formed in a substrate (e.g., a silicon substrate or silicon on insulator (SOI) substrate). The gas cell further includes at least one gas inlet and at least one gas outlet coupled for injection of a gas into and out of the gas cell, respectively. In addition, the gas cell further includes an optical input and an optical output, each optically coupled to direct light into and out of the gas cell, respectively. In addition, a capping layer may be bonded to the substrate to form a top surface of the gas cell.