Compact multi-pass gas cell for multi-gas spectral sensors

    公开(公告)号:US11150130B2

    公开(公告)日:2021-10-19

    申请号:US16808238

    申请日:2020-03-03

    申请人: Si-Ware Systems

    摘要: Aspects of the disclosure relate to a multi-pass gas cell that includes a set of two or more reflectors, an input collimating optical component, and an output focusing optical component. The input and output optical components are integrated with at least one of the two or more reflectors. For example, the input and output optical components may be integrated on opposite ends of a single one of the reflectors or may be integrated on the same end of a single reflector. The input and output optical components may further be integrated with different reflectors. In some examples, the set of reflectors and optical components may be fabricated within the same substrate.

    STRUCTURED SILICON-BASED THERMAL EMITTER
    9.
    发明申请
    STRUCTURED SILICON-BASED THERMAL EMITTER 有权
    结构硅基热发射体

    公开(公告)号:US20170012199A1

    公开(公告)日:2017-01-12

    申请号:US15203773

    申请日:2016-07-06

    申请人: Si-Ware Systems

    IPC分类号: H01L49/00

    摘要: An optical radiation source produced from a disordered semiconductor material, such as black silicon, is provided. The optical radiation source includes a semiconductor substrate, a disordered semiconductor structure etched in the semiconductor substrate and a heating element disposed proximal to the disordered semiconductor structure and configured to heat the disordered semiconductor structure to a temperature at which the disordered semiconductor structure emits thermal infrared radiation.

    摘要翻译: 提供由诸如黑色硅的无序半导体材料产生的光辐射源。 光辐射源包括半导体衬底,在半导体衬底中蚀刻的无序半导体结构和设置在无序半导体结构附近的加热元件,其被配置为将无序半导体结构加热到无序半导体结构发射热红外辐射的温度 。