公开(公告)号：US20220084793A1

公开(公告)日：2022-03-17

申请号：US17209480

申请日：2021-03-23

申请人： Sigma Carbon Technologies

发明人： Tarun Sharda ,  Rajneesh Bhandari

IPC分类号： H01J37/32 ,  C23C16/511 ,  C23C16/52

摘要： The invention provides a system for growth of one or more crystalline materials, specifically diamonds. The system comprises a microwave generator integrated with a pressure controller and an Optical Emission Spectrometer (OES) to form an Integrated Microwave Generator System (IMGS). The OES provides a real-time feedback loop to an IMGS controller based on microwave plasma input from a microwave plasma reactor, to control one or more parameters (power, pressure, power density, and pulsed power) in a closed loop and maintain required proposition of plasma constituents for the growth of diamonds in the microwave plasma reactor. The OES monitors real-time concentration of plasma constituents just above the growing surface of diamonds and feeds the real-time information to the IMGS controller to automatically adjust power density to maintain the concentration of plasma constituents on the growing surface of diamonds.