公开(公告)号：US20230251548A1

公开(公告)日：2023-08-10

申请号：US18164092

申请日：2023-02-03

申请人： Silicon Light Machines Corporation

发明人： Olav SOLGAARD ,  Stephen Sanborn HAMANN

IPC分类号： G02F1/29 ,  G01S7/481

CPC分类号： G02F1/292 ,  G01S7/4817 ,  G02F2203/12 ,  G02F2203/05

摘要： A micromechanical systems (MEMS)-based spatial light modulator (SLM) incorporates a mirror to increase the travel path of light. Light incoming to the MEMS-based SLM is incident on a modulation element of a phased-array. The modulation element reflects the light to a mirror, which reflects the light back to the modulation element. The modulation element reflects the light reflected off the mirror out of the MEMS-based SLM. A dispersive element allows the light to be steered by changing a wavelength of the light.