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公开(公告)号：US12117606B2
公开(公告)日：2024-10-15
申请号：US17001477
申请日：2020-08-24
发明人： Yuki Ashida , Stephen Hamann , Olav Solgaard , Alexander Payne , Lars Eng , James Hunter
CPC分类号： G02B26/0833 , B81B3/0083 , B81B7/0067 , B81B7/02 , G01S7/4817 , G02B5/1814 , B81B2201/047
摘要： An optical scanner including micro-electromechanical system phased-arrays suitable for use in a LiDAR system, and methods of operating the same are described. Generally, the scanner includes an optical transmitter having first phased-arrays to receive light from a light source, form a swath of illumination in a far field scene and to modulate phases of the light to sweep or steer the swath over the scene in two-dimensions (2D). An optical receiver in the scanner includes second phased-arrays to receive light from the far field scene and direct at least some of the light onto a detector. The second phased-arrays are configured to de-scan the received light by directing light reflected from the far field scene onto the detector while rejecting background light. In one embodiment the second phased-arrays direct light from a slice of the far field scene onto a 1D detector array.
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公开(公告)号：US11933962B2
公开(公告)日：2024-03-19
申请号：US17591898
申请日：2022-02-03
发明人： Stephen Hamann , Alexander Payne , Lars Eng , James Hunter , Tianbo Liu , Gregory Jacob
CPC分类号： G02B26/001 , G02B26/023 , G02B26/0808 , G02B26/0841 , G03F7/70191
摘要： Spatial light modulators (SLMs) and systems using same are described. Generally, the system includes a laser, a fixture holding a workpiece to be processed using the laser, illumination optics to illuminate the SLM with laser light, imaging optics to focus modulated light from the SLM onto the workpiece, and a controller to control the laser, the SLM, imaging optics and the fixture to scan the modulated light across a workpiece surface. The SLM includes an array of microelectromechanical system based diffractors, each including an electrostatically deflectable member coupled to a first light reflective surface and to bring light reflected from the first light reflective surface into interference with light reflected from a second light reflective surface in the SLM. The controller is operable to provide analog gray-scale control of an intensity of modulated light reflected from each diffractor by controlling an electrostatic force generated by a driver coupled thereto.
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公开(公告)号：US20230251548A1
公开(公告)日：2023-08-10
申请号：US18164092
申请日：2023-02-03
CPC分类号： G02F1/292 , G01S7/4817 , G02F2203/12 , G02F2203/05
摘要： A micromechanical systems (MEMS)-based spatial light modulator (SLM) incorporates a mirror to increase the travel path of light. Light incoming to the MEMS-based SLM is incident on a modulation element of a phased-array. The modulation element reflects the light to a mirror, which reflects the light back to the modulation element. The modulation element reflects the light reflected off the mirror out of the MEMS-based SLM. A dispersive element allows the light to be steered by changing a wavelength of the light.
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公开(公告)号：US20220252858A1
公开(公告)日：2022-08-11
申请号：US17591858
申请日：2022-02-03
发明人： Alexander Payne , James Hunter , Tianbo Liu
摘要： A high-contrast two-dimensional Micro-Electromechanical System light modulator and methods of fabricating and operating the same in various applications is provided. Generally, the light modulator includes a single, deformable membrane suspended over a surface of a substrate by posts at corners thereof, the deformable membrane including an electrostatically deflectable patterned central portion (CP) and a number of flexures through which the CP is coupled to the posts. A membrane reflector is formed on a surface of the CP, and a substrate reflector over a surface of the substrate, and the substrate reflector exposed through void spaces between the posts, flexures and CP. The light modulator is operable so that when the membrane reflector is deformed into a non-planar surface by electrostatic deflection of the CP, and light reflected from the membrane reflector is brought into phase interference with light reflected from the substrate reflector.
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公开(公告)号：US11333894B2
公开(公告)日：2022-05-17
申请号：US16380898
申请日：2019-04-10
发明人： Yoshimi Hashimoto
摘要： A system including two dimensional, microelectromechanical system (MEMS) based spatial light modulators and anamorphic optics for improved contrast is provided. Generally, the system comprises an array of modulators having a plurality of pixels along a longitudinal axis, each pixel comprising a plurality of modulators along a transverse axis of the array. An illumination source including a laser and anamorphic optics for focuses light from the laser onto the array, and imaging optics focus modulated light from the array onto an image plane. The anamorphic optics are configured to provide a transverse numerical aperture (NA) along the transverse axis of the array that is smaller than a diffraction angle of the modulated light reflected from the array along a transverse axis of the image plane, and a longitudinal NA along the longitudinal axis of the array that is greater than the transverse NA. Other embodiments are also provided.
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公开(公告)号：US11036030B2
公开(公告)日：2021-06-15
申请号：US16430964
申请日：2019-06-04
发明人： Sae Won Lee
摘要： A Micro-Electromechanical System (MEMS) device having improved thermal management, and methods of fabricating the same are described. Generally, the device includes a piston layer suspended over a surface of a substrate by posts at four corners thereof, the piston layer including an electrostatically deflectable piston and a number of flexures through which the piston is coupled to the posts. A faceplate including an aperture through which the piston is exposed is suspended over the piston layer. Thermal sinking structures project from the surface of the substrate and extend through void spaces between the posts, the flexures and the piston of the piston layer to provide thermal management of the piston layer. The thermal posts substantially fill the void spaces without contacting either the flexures or the piston, and without altering a deflection gap between the piston and the surface of the substrate. Other embodiments are also described.
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公开(公告)号：US20210072532A1
公开(公告)日：2021-03-11
申请号：US16996346
申请日：2020-08-18
发明人： Alexander Payne , James Hunter , Lars Eng
摘要： A capacitive micro-electromechanical system (MEMS) structure or device and methods of making and operating the same are described. Generally, the MEMS device provides a large stroke while maintaining good damping, enabling fast beam steering and large scan angles. In one embodiment, the capacitive MEMS device includes a bottom electrode formed over a substrate; an electrically permeable damping structure formed over the bottom electrode, the electrically permeable damping structure including a first air-gap and a dielectric layer suspended above and separated from the bottom electrode by the first air-gap; and a plurality of movable members suspended above the damping structure and separated therefrom by a second air-gap, each of the plurality of movable members including a top electrode and being configured to deflect towards the bottom electrode by electrostatic force. Other embodiments are also described.
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公开(公告)号：US10574954B2
公开(公告)日：2020-02-25
申请号：US16209376
申请日：2018-12-04
发明人： Yoshimi Hashimoto
摘要： A multi-beam scanning system and methods of operating the same to compensate for distortion are provided. Generally, the method involves illuminating a spatial light modulator including SLM pixels arranged in parallel, each pixel including a multiple address pixels. Drive signals including image data are provided to the pixels to generate beams of modulated light reflected therefrom, which is scanned to a linear swath of a two-dimensional imaging plane using a collimate lens, a scan mirror moved about a first axis, and an imaging lens. The swath is scanned across the imaging plane in a direction orthogonal to a long axis of the swath by moving the scan mirror about a second axis. To compensate for distortion along the long axis of the swath compensated image data is provided to at least some of the address pixels generating beams of modulated light distal from an optical axis of the imaging lens.
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公开(公告)号：US20200026066A1
公开(公告)日：2020-01-23
申请号：US16184303
申请日：2018-11-08
发明人： Alexander PAYNE
IPC分类号： G02B26/08 , B22F3/105 , B29C64/135 , B29C64/268 , B33Y30/00
摘要： A spatial light modulator (SLM) having improved &endue, and methods of fabricating and operating the same are described. Generally, the SLM includes pixels each including a tensile membrane suspended over a surface of a substrate by posts at corners thereof. The tensile membrane includes an electrostatically deflectable piston and flexures through which the piston is coupled to the posts. A platform having first light reflective surfaces is supported above and separated from the piston by one or more central posts extending from the piston to the platform, and a face-plate including a second light reflective surface is suspended over the platform. The face-plate includes plurality of apertures through which the first light reflective surfaces are exposed. Electrostatic deflection of the piston brings light reflected from the first light reflective surfaces into constructive or destructive interference with light reflected from the second light reflective surface. Other embodiments are also described.
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公开(公告)号：US20180299664A1
公开(公告)日：2018-10-18
申请号：US16008772
申请日：2018-06-14
发明人： Alexander Payne , James Hunter , Lars Eng
摘要： A capacitive micro-electromechanical system (MEMS) structure or device and methods of making and operating the same are described. Generally, the MEMS device provides a large stroke while maintaining good damping, enabling fast beam steering and large scan angles. In one embodiment, the capacitive MEMS device includes a bottom electrode formed over a substrate; an electrically permeable damping structure formed over the bottom electrode, the electrically permeable damping structure including a first air-gap and a dielectric layer suspended above and separated from the bottom electrode by the first air-gap; and a plurality of movable members suspended above the damping structure and separated therefrom by a second air-gap, each of the plurality of movable members including a top electrode and being configured to deflect towards the bottom electrode by electrostatic force. Other embodiments are also described.
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