公开(公告)号：US20230031505A1

公开(公告)日：2023-02-02

申请号：US17784135

申请日：2020-12-10

Applicant: Singapore University Of Technology And Design

Inventor： Kento YAMAGISHI ,  Tsz Him CHING ,  Michinao HASHIMOTO ,  Hiroto KOSHIKA

IPC: H05K3/10 ,  B01L3/00 ,  A61B5/00 ,  H05K3/30 ,  H05K1/09 ,  H05K1/02 ,  H05K1/18

Abstract: There is provided a method of forming a thin film-based microfluidic electronic device. The method includes: providing a first elastomeric thin film layer on a substrate; depositing a first elastomer on the first elastomeric thin film by direct ink writing to form an elastomeric structure configured to define a microfluidic channel on the first elastomeric thin film layer; providing a second elastomeric thin film layer over the elastomeric structure to cover the microfluidic channel; providing a sacrificial layer on the second elastomeric thin film; depositing liquid metal into the microfluidic channel to form a conductor in the microfluidic channel; and electrically connecting the conductor to an electronic component. The thin film-based microfluidic electronic device is a tissue or skin adhesive sensor including a skin adhesive acoustic device.