HANDLING OF STACKED SUBSTRATES
    1.
    发明申请

    公开(公告)号:US20180065820A1

    公开(公告)日:2018-03-08

    申请号:US15256357

    申请日:2016-09-02

    Abstract: A pneumatic device for transporting a substrate during a manufacturing operation is described. The pneumatic device can include multiple suction assemblies for securely coupling the substrate to the pneumatic device. The vertical position of the suction assemblies can be varied so that when vacuum is applied through the suction assemblies to the substrate, the substrate is in a bent configuration when secured to the pneumatic device. When the pneumatic device is used to lift the substrate off a stack of other substrates, the bending of the substrate reduces the surface area contact and likelihood of inadvertently removing additional substrates from the stack of substrates.

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